Amorphous phase forming ability in(W–C)-based sputtered films

Trindade, B.; Vieira, M.T.; Bauer‐Grosse, E.

doi:10.1016/s1359-6454(97)00336-4

Cited by 32 publications

(20 citation statements)

References 19 publications

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“…A possible explanation to this tribological behaviour can be given by considering a friction induced decomposition of the nonstoichiometric carbides and/or metastable solid solutions releasing free carbon and forming structures that accomodate carbon vacancies. In this sense, the decomposition of tungsten carbide generating carbon and substoichiometric W x C y compounds is described in the phase diagram of the W-C system and was confirmed during thermal annealing of these same coatings [40,41]. In the case of the TiBC/a-C, previous studies have pointed out the formation of a metastable hexagonal TiB x C y phase by addition of carbon into a initial hexagonal TiB 2 structure [31,42] or binary and ternary solid solution of the Ti-B-C system [42,43].…”

Section: Jc Sanchez-lopez Et Al (Paper B6-2-1)mentioning

confidence: 62%

Metal carbide/amorphous C-based nanocomposite coatings for tribological applications

Sánchez-López

Martínez-Martínez

Abad

et al. 2009

Surface and Coatings Technology

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This paper tries to assess the factors governing the tribological behaviour of different nanocomposites films composed by metallic carbides (MeC) mixed with amorphous carbon (a-C). Different series of MeC/a-C coatings (with Me: Ti(B) and W) were prepared by magnetron sputtering technique varying the power applied to the graphite target in order to tailor the carbon content into the films. A deep investigation of the chemical and structural features at the nano-scale is carried out by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), electron energy-loss spectroscopy (EELS) and Raman spectroscopy techniques in order to establish correlations with the tribological properties measured by a pin-on-disk tribometer in ambient air. The analysis of the counterfaces by Raman confocal microscopy after the friction tests is used to follow the chemical phenomena occurring at the contact area responsible of the observed friction behaviour. The importance of determining the nanocrystalline/amorphous ratio is highlighted as a key-parameter to control the tribological properties. A comparative analysis of the mechanical and tribological performance of the three systems (TiC/a-C, WC/a-C, TiBC/a-C) is done and conclusions are obtained concerning the friction and wear mechanism involved.

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Section: Jc Sanchez-lopez Et Al (Paper B6-2-1)mentioning

confidence: 62%

Metal carbide/amorphous C-based nanocomposite coatings for tribological applications

Sánchez-López

Martínez-Martínez

Abad

et al. 2009

Surface and Coatings Technology

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“…In our case, cr-Ti exists at room temperature with ~50 at.% of Al. The basic reason for a metastable solid solution forming under such conditions might be envisaged on the sputtering process [9]. The high cooling rates reached b> this process give rise to a low mobility of the adatoms.…”

Section: Resultsmentioning

confidence: 99%

The influence of silver on the structure and mechanical properties of (TiAl)-based intermetallics

et al. 1999

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The influence of silver on the structure and mechanical properties of sputter-deposited Ti-ALAg films with an aluminium content close to 48 at.% and 0 < at.% Ag < 3 was investigated. A new tensile test procedure has been developed to evaluate the ductiLity of the films. The results show that the as-deposited films are metastable formed, essentially, by an extended c-u-Ti solid solution. Annealing at 6OO'C gives rise to the formation of y-TN intermetallic compound. Silver does not lead to structural modifications of the TiAl system nor influences significantly its ductility. However, a hardness increase of the as-deposited fihns with silver contents up 10 1.6 at.% is observed. (C 1999 Elsevier Science S.A. All rights reserved.Rewords:

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“…The films offer excellent material properties such as hardness, very high melting points (3422 8C), and chemical resistance, which can be utilized for surface protection of softer materials, or materials which are more prone to corrosion. [5] The tungsten carbide phases WC and WC 2 are promising thin film diffusion barrier materials for microelectronic devices because of their chemical inertness [6,7] and good electrical conductivity. Due to the high melting points (2870 8C for WC), tungsten carbide thin films are suitable for strengthening the surface of metal-cutting and wire-drawing dies.…”

Section: Introductionmentioning

confidence: 99%

[cis‐(1,3‐Diene)₂W(CO)₂] Complexes as MOCVD Precursors for the Deposition of Thin Tungsten – Tungsten Carbide Films

Jipa¹,

Heinemann²,

Schneider³

et al. 2010

Chemical Vapor Deposition

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Tungsten -tungsten carbide thin films are deposited by metal-organic (MO)CVD on silica-coated silicon wafers using [cis-(1,3-butadiene) 2 W(CO) 2 ] and [cis-(1,3-cyclohexadiene) 2 W(CO) 2 ], respectively, as tunable precursor complexes. The compounds are prepared through photochemical ligand exchange reactions from [W(CO) 6 ] and fully characterized, including X-ray structure determination and detailed differential thermal analysis (DTA)/thermogravimetry (TG) investigations. Gas-phase diffusion coefficients and the vapor pressure of the compounds are calculated. The MOCVD experiments are performed in a vertical cold-wall reactor and the exhaust gas is analyzed by gas chromatography (GC). X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), and scanning electron microscopy (SEM) measurements are utilized for film characterization. Consequences of the high oxophilicity of freshly formed tungsten surfaces, consecutive surface reactions of the complex ligands, film growth, and film properties are discussed. Inside the layers, tungsten carbide is identified as the main component.

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Amorphous phase forming ability in(W–C)-based sputtered films

Cited by 32 publications

References 19 publications

Metal carbide/amorphous C-based nanocomposite coatings for tribological applications

Metal carbide/amorphous C-based nanocomposite coatings for tribological applications

The influence of silver on the structure and mechanical properties of (TiAl)-based intermetallics

[cis‐(1,3‐Diene)₂W(CO)₂] Complexes as MOCVD Precursors for the Deposition of Thin Tungsten – Tungsten Carbide Films

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Amorphous phase forming ability in(W–C)-based sputtered films

Cited by 32 publications

References 19 publications

Metal carbide/amorphous C-based nanocomposite coatings for tribological applications

Metal carbide/amorphous C-based nanocomposite coatings for tribological applications

The influence of silver on the structure and mechanical properties of (TiAl)-based intermetallics

[cis‐(1,3‐Diene)2W(CO)2] Complexes as MOCVD Precursors for the Deposition of Thin Tungsten – Tungsten Carbide Films

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[cis‐(1,3‐Diene)₂W(CO)₂] Complexes as MOCVD Precursors for the Deposition of Thin Tungsten – Tungsten Carbide Films