Amorphous LiCoO2 thin films on Li1+x+yAlxTi2−xSiyP3−yO12 prepared by radio frequency magnetron sputtering for all-solid-state Li-ion batteries

Xie, Jian; Imanishi, Nobuyuki; Zhang, T.; Hirano, Atsushi; Takeda, Yasuo; Cao, Gaoshao; Zhao, Xinbao

doi:10.1016/j.electacta.2010.04.095

Cited by 7 publications

(10 citation statements)

References 46 publications

(40 reference statements)

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“…Xie et al investigated the effects of the annealing temperature on R int at the LCO/LATP combining with polymer electrolyte by preparing amorphous LCO thin films on LATP sheets by radio frequency (RF) sputtering. [ 28 ] They concluded that the R int of their LCO/LATP was reduced to less than 2000 Ω cm 2 at 50 °C when the sample was annealed below 400 °C. Our results are consistent with their findings as R int at 25 °C decreased to 95 Ω cm 2 by annealing at 350 °C.…”

Section: Resultsmentioning

confidence: 99%

Low‐Resistive LiCoO₂/Li_1.3Al_0.3Ti₂(PO₄)₃ Interface Formation by Low‐Temperature Annealing Using Aerosol Deposition

et al. 2021

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Interfacial resistance at electrode‐high Li+ conductive solid electrolytes must be reduced well to develop high‐power all‐solid‐state batteries using oxide‐based solid electrolytes (Ox‐SSBs). Herein, crystalline electrode films of LiCoO2 (LCO) are formed on a high Li+ conductive crystalline‐glass solid electrolyte sheet, Li1.3Al0.3Ti2(PO4)3 (LATP) (σ25 °C = 1 × 10−4 S cm−1), at room temperature by aerosol deposition (AD), and the effects of the annealing temperature on the interfacial resistivities (Rint) at the LCO/LATP are investigated. The Rint visibly increases by annealing over 500 °C with the growth of Co3O4 as a reactant. In contrast, Rint is reduced to ≈100 Ω cm2 by low‐temperature annealing at 250–350 °C due to superior contact through the structural rearrangement of an artificial metastable interface formed by the AD. These results are applied to bulk‐type Ox‐SSB, Li/Li7La3Zr2O12(LLZ)/LCO–LATP, and our best Ox‐SSB delivers a discharge capacity of 100 mA cm−2 at 100 °C.

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Section: Resultsmentioning

confidence: 99%

Low‐Resistive LiCoO₂/Li_1.3Al_0.3Ti₂(PO₄)₃ Interface Formation by Low‐Temperature Annealing Using Aerosol Deposition

et al. 2021

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“…This result is in agreement with previous work, reporting that crystalline phases with a regular atomic arrangement can be obtained by either substrate heating during the deposition process or a post‐annealing treatment at high temperature ,. However, such a heating treatment step of the thin films is not compatible with the polymer electrolytes and low‐temperature substrate materials . In addition, it will add complexity to the battery preparation process and also cause unwanted side reactions between the deposited film and the electrolyte, limiting the application of Li‐ion microbatteries.…”

Section: Resultsmentioning

confidence: 99%

“…In addition, it will add complexity to the battery preparation process and also cause unwanted side reactions between the deposited film and the electrolyte, limiting the application of Li‐ion microbatteries. Hence, low‐temperature processing of the thin film cathodes are favored to fabricate the microbatteries ,…”

Section: Resultsmentioning

confidence: 99%

Sputter‐Deposited Amorphous LiCuPO₄ Thin Film as Cathode Material for Li‐ion Microbatteries

et al. 2018

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We report the electrochemical performance of amorphous LiCuPO4 thin films obtained by radio frequency sputtering as a cathode material for Li‐ion microbatteries. The thin films were characterized by X‐ray diffraction, scanning electron microscopy, profilometry and electrochemical techniques. Charge/discharge profiles and cycling performance were evaluated in lithium electrochemical test cells. Cyclic voltammogram of the LiCuPO4 film shows the typical redox reaction peak at ∼ 1.9 V vs. Li/Li+. A discharge capacity of 160 mAh g−1 (50 μAh cm−2) is attained for the first cycle at C/10 to reach a stable capacity of 70 mAh g−1 (22 μAh cm−2) with good stability over 160 cycles. For comparison, the electrochemical performance of a crystalline LiCuPO4 film was investigated. The first discharge could deliver a high capacity of around 375 mAh g−1 at C/10, but the capacity decayed quickly to a low capacity of 11 mAh g−1 over 50 cycles. The results show that the LiCuPO4 amorphous materials can be considered as the exciting cathode candidate for Li‐ion microbatteries.

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“…This cell exhibited an initial specific discharge capacity of 40 µAh cm −2 µm −1 that decreased to 15 µAh cm −2 µm −1 after 50 cycles. Xie et al [91] show that amorphous LCO films deposited on NASICON glass ceramics Li 1+ x + y Al x Ti 2 − x Si y P 3 − y O 12 (LATSP) at T s < 180 °C. An initial discharge capacity of 210 mAh g −1 was delivered by as-deposited LCO thin films (0.5 µm thick) on LATSP in Ar/O 2 (7:3) at a power of 100 W. A rapid-thermal annealing (RTA) process at 700 °C under flowing oxygen gas (for 20 min) was shown to be a successful method to obtain LCO thin films that consist of grains with (101) and (104) preferred orientations [92].…”

Section: Influence Of Preparation Conditionsmentioning

confidence: 99%

Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries

2019

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This review article presents the literature survey on radio frequency (RF)-magnetron sputtered LiCoO2 thin films used as cathode materials in all-solid-state rechargeable lithium microbatteries. As the process parameters lead to a variety of texture and preferential orientation, the influence of the sputtering conditions on the deposition of LiCoO2 thin films are considered. The electrochemical performance is examined as a function of composition of the sputter Ar/O2 gas mixture, gas flow rate, pressure, nature of substrate, substrate temperature, deposition rate, and annealing temperature. The state-of-the-art of lithium microbatteries fabricated by the rf-sputtering method is also reported.

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Amorphous LiCoO2 thin films on Li1+x+yAlxTi2−xSiyP3−yO12 prepared by radio frequency magnetron sputtering for all-solid-state Li-ion batteries

Cited by 7 publications

References 46 publications

Low‐Resistive LiCoO₂/Li_1.3Al_0.3Ti₂(PO₄)₃ Interface Formation by Low‐Temperature Annealing Using Aerosol Deposition

Low‐Resistive LiCoO₂/Li_1.3Al_0.3Ti₂(PO₄)₃ Interface Formation by Low‐Temperature Annealing Using Aerosol Deposition

Sputter‐Deposited Amorphous LiCuPO₄ Thin Film as Cathode Material for Li‐ion Microbatteries

Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries

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Amorphous LiCoO2 thin films on Li1+x+yAlxTi2−xSiyP3−yO12 prepared by radio frequency magnetron sputtering for all-solid-state Li-ion batteries

Cited by 7 publications

References 46 publications

Low‐Resistive LiCoO2/Li1.3Al0.3Ti2(PO4)3 Interface Formation by Low‐Temperature Annealing Using Aerosol Deposition

Low‐Resistive LiCoO2/Li1.3Al0.3Ti2(PO4)3 Interface Formation by Low‐Temperature Annealing Using Aerosol Deposition

Sputter‐Deposited Amorphous LiCuPO4 Thin Film as Cathode Material for Li‐ion Microbatteries

Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries

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Product

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Low‐Resistive LiCoO₂/Li_1.3Al_0.3Ti₂(PO₄)₃ Interface Formation by Low‐Temperature Annealing Using Aerosol Deposition

Low‐Resistive LiCoO₂/Li_1.3Al_0.3Ti₂(PO₄)₃ Interface Formation by Low‐Temperature Annealing Using Aerosol Deposition

Sputter‐Deposited Amorphous LiCuPO₄ Thin Film as Cathode Material for Li‐ion Microbatteries