Amorphous hydrogenated carbon coatings on IC packaging mold by ECR-CVD system

Guo, C.T.; Chen, P. C.

doi:10.1016/j.apsusc.2007.05.045

Cited by 9 publications

(6 citation statements)

References 37 publications

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“…Usually, Raman spectra of a-C:H films are characterised by a G band around 1500 cm −1 and a D band around 1300 cm −1 . The G peak is due to the stretching bond of pairs of sp 2 atoms in the rings and chains while D peak is due to disordered clusters of sp 3 sites (Guo & Chen 2007;Maheswaran et al 2011;Santos et al 2013). The results are shown in Figure 3, where the deconvolution using two Gaussians corresponding to D and G bands associated with sp 3 and sp 2 hybridisations, respectively, are indicated.…”

Section: Resultsmentioning

confidence: 96%

Barrier properties to surrogates of hydrogenated carbon nano-films deposited on PET by plasma-enhanced chemical vapour deposition

Oliveira

Echegoyen

Nerín

et al. 2014

Food Additives & Contaminants: Part A

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Poly(ethylene terephthalate) resin was contaminated with a series of surrogates using a US Food and Drug Administration protocol. The contaminated samples were coated with two different kinds of hydrogenated amorphous carbon thin films (a-C:H): one with diamond-like hydrogenated amorphous carbon and another with polymer-like hydrogenated carbon (PLCH) phases. To evaluate the barrier properties of the a-C:H films, migration assays were performed using food simulants. After the tests, analysis by gas chromatography with different detectors was carried out. The appearance of the films before and after the migration experiments was studied by field emission scanning electron microscopy. The results showed that a-C:H films have good barrier properties for most of the evaluated compounds, mainly when they are deposited as PLCH phase.

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Section: Resultsmentioning

confidence: 96%

Barrier properties to surrogates of hydrogenated carbon nano-films deposited on PET by plasma-enhanced chemical vapour deposition

Oliveira

Echegoyen

Nerín

et al. 2014

Food Additives & Contaminants: Part A

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“…DLC film exhibits excellent tribological properties such as low friction, high wear resistance, a smooth surface, and high hardness [1][2][3]. This type of film is currently used in many industrial applications such as automobile sliding parts, dies, cutting tools, and magnetic disk protective coating, and the potential fields of application are increasing [4][5][6]. On the other hand, possible friction reduction mechanisms for DLC films have been reported, such as reduced shearing force of the sliding interface and termination of the film surface during sliding.…”

Section: Introductionmentioning

confidence: 99%

Effects of Applied Heat and Stress on Structural Changes of DLC Film

et al. 2012

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Diamond-like carbon (DLC) is considered to be predominantly amorphous, whereby small clusters of microcrystalline structures with sp 3 and sp 2 bonding, and an amorphous matrix, coexist. DLC film has some extraordinary properties such as high hardness, low friction, and high wear resistance. There is strong demand for the use of such DLC properties in a wide range of tribological applications, including cutting tools, mechanical elements of automobiles, die surfaces, and computer hard disks. On the other hand, it is widely known that changes in the structure of DLC film during sliding affect its tribological properties. However, the precise mechanism of the structural change remains unclear. In this study, the effects of applied heat and stress on the structural changes of DLC films were investigated to evaluate the predominant factor in this mechanism. DLC film was deposited on a steel substrate using plasma-based ion implantation and deposition. After heat treatment with applied force, structural changes of the DLC film were investigated by micro-laser Raman spectroscopy. Structural change was confirmed in DLC film annealed at temperatures over 648 K. This suggests that hydrogen evolution from the DLC film possibly caused the structural change. Greater hydrogen evolution was observed from the unloaded surface compared to the loaded area. Structural change was found to be dependent on the stress field: The tensile stress led to structural change, but the compressive stress field did not affect the structural change. These results indicate that a structural change in DLC film caused by heat treatment can be suppressed by preventing hydrogen evolution from the surface of the film.

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“…In PECVD, the hydrocarbon molecules, i.e., CH 4 and C 2 H 4 , are ionized and partially broken down into smaller radicals (including CH, CH 2 , CH 3 , and C 2 H etc, neutral or charged) through the bias voltage, the radio frequency, [10] or the electron cyclotron resonance. [11] These radicals are then driven to bombard the substrate and give rise to the a-C:H film growth.…”

mentioning

confidence: 99%

Molecular Dynamical Simulations on a-C:H Film Growth from C and H Atomic Flux: Effect of Incident Energy

Quan

Fang

et al. 2010

Chinese Phys. Lett.

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Molecular dynamical simulation is carried out to investigate the effects of the incident energy on a-C:H film growth from C and H atomic flux. Our simulations show that the film growth at low incident energy (1 eV) is dominated by the adsorption of H and C atoms. At moderate incident energy (10 and 20 eV), the abstraction reaction of incident H atoms with H atoms adsorbed at the surface becomes important. At high incident energy (30 and 40 eV), the a-C:H film growth is a two-step process: one is the adsorption and the shallow implantation of C atoms, and the other is the deep implantation of H atoms.

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Amorphous hydrogenated carbon coatings on IC packaging mold by ECR-CVD system

Cited by 9 publications

References 37 publications

Barrier properties to surrogates of hydrogenated carbon nano-films deposited on PET by plasma-enhanced chemical vapour deposition

Barrier properties to surrogates of hydrogenated carbon nano-films deposited on PET by plasma-enhanced chemical vapour deposition

Effects of Applied Heat and Stress on Structural Changes of DLC Film

Molecular Dynamical Simulations on a-C:H Film Growth from C and H Atomic Flux: Effect of Incident Energy

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