2016
DOI: 10.1016/j.surfcoat.2016.09.064
|View full text |Cite
|
Sign up to set email alerts
|

Amorphous hydrogenated carbon (a-C:H) depositions on polyoxymethylene: Substrate influence on the characteristics of the developing coatings

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

3
27
0

Year Published

2017
2017
2024
2024

Publication Types

Select...
6

Relationship

2
4

Authors

Journals

citations
Cited by 20 publications
(30 citation statements)
references
References 37 publications
3
27
0
Order By: Relevance
“…Model ideas regarding the structure of a‐C:H layers suggest an alternating composition consisting of sections with a graphite and diamond‐like structure . For PECVD depositions of a‐C:H on several polymer materials, Catena et al observed a thickness‐dependent generation of specifically modified material properties on top, especially caused by the size of the carbon clusters and an increasing content of sp 2 ‐carbon centers . Similar observations were found by some of the authors for these a‐C:H depositions on silicon (100) wafers .…”
Section: Introductionsupporting
confidence: 62%
See 1 more Smart Citation
“…Model ideas regarding the structure of a‐C:H layers suggest an alternating composition consisting of sections with a graphite and diamond‐like structure . For PECVD depositions of a‐C:H on several polymer materials, Catena et al observed a thickness‐dependent generation of specifically modified material properties on top, especially caused by the size of the carbon clusters and an increasing content of sp 2 ‐carbon centers . Similar observations were found by some of the authors for these a‐C:H depositions on silicon (100) wafers .…”
Section: Introductionsupporting
confidence: 62%
“…The coating of silicon wafers (100) with a‐C:H was arranged according to a well‐established procedure via RF‐PECVD . The Si samples with a 500 nm a‐C:H layer were irradiated with UV light without further workup in a 0.0011 mol L −1 solution of 4 or 5 , respectively, for 95 min using a procedure that is closely related to published results (see the Experimental Section) .…”
Section: Resultsmentioning
confidence: 99%
“…So-called subplantation processes are a reasonable explanation for this behavior, which consists of three main reactions: (i) Surface etching with plasma species, (ii) insertion of C and H+ ions into the (sub)surface and (iii) surface absorption of plasma radicals to form new bonds. The interlayer formation stops at a layer thickness of around 50 nm and is considered complete as soon as the formation of =CH2 bonds takes place [23,41]. Therefore, a possible interlayer phase for the present PHB is less than 50 nm.…”
Section: Drift Spectroscopymentioning
confidence: 93%
“…The coating process is described in detail elsewhere [5,20,21], but here only briefly: Sample holders were placed 275 mm in front of the plasma source. This direct alignment results in so-called r-type diamond-like carbon (DLC) coatings [20][21][22][23]. An initial oxygen plasma (10 min, 200 W, 1 Pa, 65 sccm/min) cleaned and activated the PHB surface for further coating.…”
Section: Sample Preparation and Film Depositionmentioning
confidence: 99%
See 1 more Smart Citation