Ammonia response of thin films grown on GaAs using PbO + Bi2O3 mixtures

Kostryukov, V. F.; Mittova, I. Ya.

doi:10.1134/s0020168515040056

Cited by 3 publications

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“…One way to solve this problem is chemically stimulated oxidation [14], allowing the kinetic blockage of adverse stages due to the targeted change in the routes of heterogeneous processes when certain chemostimulant compounds are introduced into the system. In [15,16], it was shown that layers grown under the influence of oxide chemostimulants are characterized by the reproducible temperature dependence of the resistance, thermally stable and are of practical interest for use as the sensitive elements of semiconductor gas sensors.…”

Section: Introductionmentioning

confidence: 99%

Thin Films on the Surface of GaAs, Obtained by Chemically Stimulated Thermal Oxidation, as Materials for Gas Sensors

et al. 2022

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Semiconductor metal oxide films on the surface of gallium arsenide are obtained by chemostimulated oxidation under the influence of a Sb2O3 + Y2O3 composition. The chemical composition of the obtained films and the surface morphology are determined by EPXMA, IR spectroscopy, and AFM. The main components of the films are gallium and arsenic, which are in the oxidized state. The content of the chemical stimulator (Sb2O3) does not exceed 2%. Films obtained under the influence of composites 60% Sb2O3 + 40% Y2O3 and 80% Sb2O3 + 20% Y2O3 are characterized by the maximum surface roughness. The samples obtained in this work demonstrate n-type semiconductor properties in the temperature range of 20–400 °C. It is established that the obtained samples have a gas-sensitive response to NH3 and CO. The maximum value of the sensory signal appears for the samples obtained under the influence of compositions 80% Sb2O3 + 20% Y2O3, which are characterized by the most developed surfaces. The resulting films are selective to the studied gases—the difference in temperature for the maximum signal is 60 °C (200 °C for CO and 260 °C for NH3).

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Section: Introductionmentioning

confidence: 99%