Abstract. Up to now, sensor applications have rarely used materials whose
dielectric properties are a function of the gas concentration. A sensor
principle, by which this material effect can be utilized, is based planar
radio-frequency sensors. For the first time, such a sensor was equipped with
an integrated heater and successfully operated at temperatures up to
700 ∘C. This makes it possible to apply materials that show
gas-dependent changes in the dielectric properties only at higher
temperatures. By coating the planar resonance structure with a zeolite,
ammonia could be detected. The amount of ammonia stored in the sensitive
layer can thereby be determined, since the resonant frequency of the sensor
shifts with its ammonia loading. Desorption measurements showed a dependence
of the storage behavior of the ammonia in the gas-sensitive layer on the
operating temperature of the sensor. Thus, it was possible that by operating
the sensor at 300 ∘C, it only shows a gas-concentration-dependent
signal. At lower operating temperatures, on the other hand, the sensor could
possibly be used for dosimetric determination of very low ammonia
concentrations.