Ammonia gas sensors based on ZnO/SiO2 bi-layer nanofilms on ST-cut quartz surface acoustic wave devices

Tang, Yong; Li, Zhijie; Ma, Jianguo; Guo, Yuanjun; Fu, Yong Qing; Zu, Xiaotao

doi:10.1016/j.snb.2014.04.046

Cited by 67 publications

(41 citation statements)

References 33 publications

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“…Among the various SAWTs, such as microfluidic and RFID techniques, the SAW sensor technique has been attracting more attention due to the serious air pollution in recent years [22][23][24][25]. SAW sensors have advantages of high sensitivity, high speed, good reliability, high accuracy, and low cost, which are suitable for practical applications.…”

Section: Introductionmentioning

confidence: 99%

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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Northumbria University has developed Northumbria Research Link (NRL) to enable users to access the University's research output. Copyright © and moral rights for items on NRL are retained by the individual author(s) and/or other copyright owners. Single copies of full items can be reproduced, displayed or performed, and given to third parties in any format or medium for personal research or study, educational, or not-for-profit purposes without prior permission or charge, provided the authors, title and full bibliographic details are given, as well as a hyperlink and/or URL to the original metadata page. The content must not be changed in any way. Full items must not be sold commercially in any format or medium without formal permission of the copyright holder. The full policy is available online: http://nrl.northumbria.ac.uk/policies.html This document may differ from the final, published version of the research and has been made available online in accordance with publisher policies. To read and/or cite from the published version of the research, please visit the publisher's website (a subscription may be required.) This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. and SiO2-TiO2 films showed positive frequency shifts, whereas SiO2 film exhibits a negative frequency shift to NH3 gas. it is believed that the negative frequency shift was mainly caused by the increase of NH3 mass loading on the sensitive film while the positive frequency shift was associated to the condensation of the hydroxyl groups (-OH) on the film making the film stiffer and lighter, when exposed to NH3 gas. It demonstrated that humidity played a significant factor on the sensing performance. Comparative studies exhibited that the sensor based on the composite SiO2-TiO2 film had a much better sensitivity to NH3 at a low concentration level (1 ppm) with a response of 2 KHz, and also showed fast response and recovery, excellent selectivity, stability and reproducibility. Accepted Manuscript

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Section: Introductionmentioning

confidence: 99%

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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“…Many proven SAW-based sensors were developed for sensing gas species, temperature, force, torque, and so on [1][2][3][4][5]. Recently, referring to the magnetostrictive thin film as the sensing material or magnetoresistor as the external loaded sensor, a new concept of SAW-based magnetic/current sensor were proposed, allowing possible features of fast response, high sensitivity, strong anti-interference, and small size.…”

Section: Introductionmentioning

confidence: 99%

Development of a Magnetostrictive FeNi Coated Surface Acoustic Wave Current Sensor

et al. 2017

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Featured Application: The developed magnetostrictive FeNi coated Surface acoustic wave sensor with high sensitivity; fast response; strong anti-interference; good linearity and repeatability; and lower hysteresis error will be a potential candidate for current monitoring application in smart grid line testing; metallurgical and power supplies; rail transit safety warnings and rescue.Abstract: A magnetostrictive FeNi-coated surface acoustic wave (SAW)-based current sensor was proposed in this work. The weak remanence and hysteresis effect of the FeNi itself contributes to suppress the asymmetry in sensor response at increasing and decreasing current. The sensor response was simulated by solving the coupled electromechanical field equation in layered structure considering the magnetostrictive effect and an approach of effective dielectric constant. The effects from the aspect ratio and thickness of the FeNi film on sensor response were analyzed to determine the optimal design parameters. Differential oscillation structure was used to form the sensor, in which, the FeNi thin film was deposited along the SAW propagation of the sensor chip by using RF magnetron sputtering. The magnetostrictive effect of the FeNi coating induced by the magnetic loading generates the perturbation in SAW velocity, and corresponding oscillation frequency. High sensitivity of 10.7 KHz/A, good linearity and repeatability, lower hysteresis error of 0.97% were obtained from the developed prototype 150 MHz SAW FeNi coated current sensor.

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“…Detection of NH 3 in trace amounts is important in terms of environmental protection and human health, as well as industry production. In recent years, numerous materials including semiconducting oxide materials, such as ZnO [1,2], ZrO 2 [3], CdO [4] and TiO 2 [5], organic compounds [6,7] and novel materials such as carbon nanotubes [8] and graphene [9,10] are exploited for ammonia detection due to their superior ammonia gas sensing properties. Composite system based sensors have been demonstrated good sensitivity and selectivity to a particular gas [11,12] by varying the type and composition of the components of the composite such as metal oxide-metal oxide [1,13], novel materials (carbon nanotube and graphene)-metal oxide [9,14], polymer-metal oxide [8,15] etc.…”

Section: Introductionmentioning

confidence: 99%

Surface acoustic wave ammonia sensor based on ZnO/SiO2 composite film

Wang

Ma²,

et al. 2015

Journal of Hazardous Materials

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Ammonia gas sensors based on ZnO/SiO2 bi-layer nanofilms on ST-cut quartz surface acoustic wave devices

Cited by 67 publications

References 33 publications

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Development of a Magnetostrictive FeNi Coated Surface Acoustic Wave Current Sensor

Surface acoustic wave ammonia sensor based on ZnO/SiO2 composite film

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