Ambient Temperature-Gradient Compensated Low-Drift Thermopile Flow Sensor

Dijkstra, M.; Lammerink, Theodorus S.J.; Boer, Meint J. de; Wiegerink, Remco J.; Elwenspoek, M.

doi:10.1109/memsys.2009.4805423

Cited by 11 publications

(10 citation statements)

References 8 publications

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“…Furjes et al [10] employed numerical simulation to obtain an optimum geometric design, including device dimensions and channel depth. Nguyen The accuracy of the calorimetric concept is limited by the drift in the electrical resistance of the thin film layers and the influence of external temperature gradients across the sensor element [17]. In order to overcome the limit of this kind of thermal flow sensor, some researchers make an attempt to solve these limits.…”

Section: T mentioning

confidence: 99%

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Investigation of Thermal Flow Sensor Based on Laser Induced Fluorescence Technique

Xu¹,

Nguyen²,

Wong³

2011

MNS

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In this paper, the heat transfer characteristics of a thermal flow sensor are investigated experimentally and numerically. DI-water is employed as the working fluid. Operation mode with a constant heater temperature is considered in our experiment. The main part of the thermal flow sensor is a cylindrical copper heater. Laser induced fluorescence (LIF) method is used to measure the full temperature field of the fluid in the microchannel. Different flowrates were studied to investigate the temperature distribution in the microchannel. The flow direction and velocity can be predicted based on the temperature distribution. A numerical simulation of conjugate forced convection-conduction heat transfer is employed to investigate the heat transfer processes in the thermal flow sensor. The measured temperature profiles along the central axis of the microchannel and the temperature differences between two positions upstream and downstream at different flowrates were compared with numerical simulation results. The results show that the LIF method is suitable for temperature characterization in microscale in general and for the characterization of thermal flow sensor in particular.

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Section: T mentioning

confidence: 99%

“…In order to overcome the limit of this kind of thermal flow sensor, some researchers make an attempt to solve these limits. Difkstra et al [17] designed a highly sensitive micro thermal flow sensor using thermopiles combined…”

Section: T mentioning

confidence: 99%

Investigation of Thermal Flow Sensor Based on Laser Induced Fluorescence Technique

Xu¹,

Nguyen²,

Wong³

2011

MNS

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“…In [1,2] we presented a surface channel technology that can be used to realize both thermal [3] and Coriolis [4] flow sensors.…”

Section: Introductionmentioning

confidence: 99%

“…Thermal flow sensors are capable of measuring liquid flow down to a few nL/min by accurate measurement of very small flow-induced temperature changes [3,5]. However, their upper flow range is limited due to the transition from the calorimetric to the anemometric heat transfer regime.…”

Section: Introductionmentioning

confidence: 99%

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

et al. 2012

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“…This Many researchers in the past had focused on the calorimetric type of thermal flow sensor due to its high sensitivity [64,65,68,69,161]. The accuracy of the calorimetric concept is limited by the drift in the electrical resistance of the thin film layers and the influence of external temperature gradients across the sensor element [162]. In order to overcome the limitations of the sensor, Difkstra et al…”

Section: Resultsmentioning

confidence: 99%

Single-phase and two-phase heat transfer in microchannels

Xu¹

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Microfluidics has attracted great attention over the last decade due to its characteristic supreme miniaturisation and low energy consumption as compared to macroscale fluid mechanics. Heat transfer is a crucial process in microfluidic systems and has a significant effect on flow behaviour. This thesis First of all, I would like to express my most sincere appreciation to my supervisor, Associate Professor Wong Teck Neng, for his immense support and encouragement throughout the research project. Most importantly, I wish to thank him for his patient guidance into the depth and breadth of the research project. I would also like to express a deep sense of gratitude and appreciation to my cosupervisor, Associate Professor Nguyen Nam-Trung for his guidance on the research project. I had benefited and learned a lot from the various technical discussions with him. I had learned a lot from his invaluable insights into many of the experimental problems. I would also like to thank Mr. Yuan Kee Hock, Higher Laboratory Executive, Thermal and Fluids Research Laboratory, School of MAE, NTU, for the valuable assistance in the experiments. The financial support of Nanyang Technological University (NTU) is gratefully acknowledged. I am fortunate to have my friends in the Thermal and Fluids Research Laboratory of NTU who have rendered much help to me during the past years. Last but not least, I would like to express my thanks to my parents for their continuous support to give me the strength to step on the road to aim for the PhD degree.

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Ambient Temperature-Gradient Compensated Low-Drift Thermopile Flow Sensor

Cited by 11 publications

References 8 publications

Investigation of Thermal Flow Sensor Based on Laser Induced Fluorescence Technique

Investigation of Thermal Flow Sensor Based on Laser Induced Fluorescence Technique

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

Single-phase and two-phase heat transfer in microchannels

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