Aluminum nanowire polarizing grids: Fabrication and analysis

Pelletier, Vincent; Asakawa, Koji; Wu, Mingshaw; Adamson, Douglas H.; Register, Richard A.; Chaikin, P. M.

doi:10.1063/1.2206100

Cited by 76 publications

(60 citation statements)

References 7 publications

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“…Fortunately however, advances in nanotechnology do allow the fabrication of such structures. [18] Pelletier et al [15] demonstrated aluminum WGPsWire grid polarizers (WGPs), periodic nano-optical metasurfaces, are convenient polarizing elements for many optical applications. However, they are still inadequate in the deep ultraviolet spectral range.…”

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confidence: 99%

“…While WGPs are well established in the VIS and IR, suitable ones were not available in the deep ultraviolet (DUV) spectral range until very recently. [12,15,16] The lack of applicable DUV WGPs originates from challenging requirements on both structure and material properties.A structural period of the polarizer has to fulfilling the zero order conditionto avoid propagation of diffraction orders greater than the zeroth one.[17] For a normal incidence of light (ϕ = 0°) with a wavelength λ in the DUV and a fused silica substrate with a refractive index n sub a period p in the order of 100 nm is necessary. Additionally, an aspect ratio (see Figure 1: ratio of height and ridge width) larger than five is typically required.…”

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Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

Siefke

Kroker

Pfeiffer

et al. 2016

Advanced Optical Materials

364

193

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defined polarization state is a key requirement in numerous photonic applications. For example, linear optical polarizers are frequently utilized in lithography, [7,8] industrial vision, [9] microscopy, ellipsometry [10] or astronomic remote sensing systems. [11] All these applications substantially benefit from efficient nano-optical wire grid polarizers.A wire grid polarizer (WGP) is a grating type metasurface (see Figure 1). The typical operation principle for such elements requires the transmittance of TM polarized light T TM (TM transversal magneticelectrical field orthogonal to the ridges) to be much larger than that of TE polarized light T TE (transversal electric-electrical field parallel to the ridges) to achieve a significant anisotropic filter functionality. Here, the extinction ratio E r = T TM /T TE is used to express the suppression of TE polarized light. [12] WGPs are highly beneficial because of large achievable element sizes (wafer size), compactness (wafer thickness), and large acceptance angles. [13] Furthermore, their nano-optical nature allows an easy integration into other (nano-)optical elements, such as litho graphy masks, [14] enabling local polarization control. Currently, applications advance toward shorter wavelengths in order to benefit from smaller foci and characteristic electronic transitions, which can be utilized for material analysis. While WGPs are well established in the VIS and IR, suitable ones were not available in the deep ultraviolet (DUV) spectral range until very recently. [12,15,16] The lack of applicable DUV WGPs originates from challenging requirements on both structure and material properties.A structural period of the polarizer has to fulfilling the zero order conditionto avoid propagation of diffraction orders greater than the zeroth one.[17] For a normal incidence of light (ϕ = 0°) with a wavelength λ in the DUV and a fused silica substrate with a refractive index n sub a period p in the order of 100 nm is necessary. Additionally, an aspect ratio (see Figure 1: ratio of height and ridge width) larger than five is typically required. [12] The simultaneous realization of large aspect ratio and small periods is technologically extremely challenging. Fortunately however, advances in nanotechnology do allow the fabrication of such structures. [18] Pelletier et al. [15] demonstrated aluminum WGPsWire grid polarizers (WGPs), periodic nano-optical metasurfaces, are convenient polarizing elements for many optical applications. However, they are still inadequate in the deep ultraviolet spectral range. It is shown that to achieve high performance ultraviolet WGPs a material with large absolute value of the complex permittivity and extinction coefficient at the wavelength of interest has to be utilized. This requirement is compared to refractive index models considering intraband and interband absorption processes. It is elucidated why the extinction ratio of metallic WGPs intrinsically humble in the deep ultraviolet, whereas wide bandgap semiconductors are superior materia...

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Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

Siefke

Kroker

Pfeiffer

et al. 2016

Advanced Optical Materials

364

193

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“…For the UV band this means we need structures of some tens of nanometers. Such a tiny pitch is achievable by means of nanotechnologies presently available [9]. Such a polarizer, combined with piezo-actuated MgF2 dichroic crystal, may allow the manufacturing of a very compact and light polarimeter, suitable for space missions.…”

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confidence: 99%

SCOUT: small chamber for optical UV tests

Pancrazzi

Landini

Romoli

et al. 2017

International Conference on Space Optics — ICSO 2012

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-SCOUT is the acronym of the new facility developed within the XUVLab laboratory of the Department of Physics and Astronomy of the University of Florence. SCOUT stands for "Small Chamber for Optical UV Tests" and has been designed to perform practical and fast measurements for those experiments requiring an evacuated environment. SCOUT has been thought, designed and manufactured by paying a particular attention to its flexibility and adaptability. The functionality and the capabilities of SCOUT have been recently tested in a measurement campaign to characterize an innovative wire-grid polarizer optimized to work in transmission in the UV band.This paper provides a description of the overall manufactured system and its performance and shows the additional resources available at the XUVLab laboratory in Florence that make SCOUT exploitable by whatever compact (within 1 m) optical experiment that investigates the UV band of the spectrum.

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“…They are highly useful for designing a variety of optical components, such as antireflection layers, wave plates, polarization separators, and local electric field enhancers. [1][2][3][4] Various lithography methods are available for producing SWPSs: electron beam writing, laser beam writing, laser interference exposure, and nanoimprinting. Each has advantages and disadvantages in terms of patterning accuracy, production throughput, and production cost.…”

Section: Introductionmentioning

confidence: 99%

Ultraviolet laser writing system based on polar scanning strategy to produce subwavelength metal gratings for surface plasmon resonance

Amako

Fujii

2013

Opt. Eng

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Abstract. We demonstrate the use of ultraviolet (UV) laser lithography in the production of subwavelength metal gratings. A laser writing system with a 413-nm Kr laser is used to write patterns on a resist-coated fused silica substrate mounted on a rotating table with a linear slider. One-and two-dimensional patterns are written in the resist at a selected sampling pitch or grating period, and the substrate is dry etched and coated with Au to obtain metallized gratings. Surface plasmon resonance dips, which appear in the reflectance spectra of the gratings, shift depending on the orientation of the incident polarization, because the gratings lack perfect symmetry owing to a system-induced skew in the writing beam. This dip shift can be considered tolerable when the gratings are used as a signal enhancer in Raman sensing applications. We conclude that UV laser writing based on polar coordinates is a candidate method for surface structuring on submicron scales. Devising a method to attain an unskewed beam will be the subject of future work. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Aluminum nanowire polarizing grids: Fabrication and analysis

Cited by 76 publications

References 7 publications

Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

SCOUT: small chamber for optical UV tests

Ultraviolet laser writing system based on polar scanning strategy to produce subwavelength metal gratings for surface plasmon resonance

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