2003
DOI: 10.1063/1.1605805
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Aluminum-doped zinc oxide films as transparent conductive electrode for organic light-emitting devices

Abstract: Highly transparent conductive, aluminum-doped zinc oxide (ZnO:Al) films were deposited on glass substrates by midfrequency magnetron sputtering of metallic aluminum-doped zinc target. ZnO:Al films with surface work functions between 3.7 and 4.4 eV were obtained by varying the sputtering conditions. Organic light-emitting diodes (OLEDs) were fabricated on these ZnO:Al films. A current efficiency of higher than 3.7 cd/A, was achieved. For comparison, 3.9 cd/A was achieved by the reference OLEDs fabricated on com… Show more

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Cited by 524 publications
(246 citation statements)
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“…Because oxygen vacancies act as donor states 31,32 , this should increase nanowire conductivity. Although the ITO and IZO microstructures and chemical bonding states are more complex, the basic crystal structures are sufficiently similar to those of In 2 O 3 and ZnO to reasonably expect that the In 2 O 3 and ZnO nanowire work functions will increase similarly upon ozone treatment 30,33 . Thus, the source/drain-nanowire contact should not significantly change with ozone treatment.…”
Section: Resultsmentioning
confidence: 98%
“…Because oxygen vacancies act as donor states 31,32 , this should increase nanowire conductivity. Although the ITO and IZO microstructures and chemical bonding states are more complex, the basic crystal structures are sufficiently similar to those of In 2 O 3 and ZnO to reasonably expect that the In 2 O 3 and ZnO nanowire work functions will increase similarly upon ozone treatment 30,33 . Thus, the source/drain-nanowire contact should not significantly change with ozone treatment.…”
Section: Resultsmentioning
confidence: 98%
“…The low manufacturing cost and nontoxicity of the AZO films make them more suitable for TCO applications than relatively expensive ITO ͑In 2 O 3 :Sn͒ films. 2,3 Thermal annealing of TCO films at temperatures as low as 400°C in air has been widely adopted in the manufacturing processes of optoelectronic devices. The air annealing of TCO films generally increases their resistivity by changing the defect concentration of the films.…”
Section: Reversible Change In Electrical and Optical Properties In Epmentioning
confidence: 99%
“…[24][25][26][27][28][29][30] Moreover, for instance, Cs-doped TiO 2 , Csdoped ZnO, Al-doped ZnO, Al-doped MoO 3 and metal oxides incorporated with other functional elements have been developed to realize efficient carrier transport with other features of high conductivity, the carrier blocking effect and optical enhancement. [31][32][33][34][35][36][37][38] These doped metal oxide interfacial layers require high-temperature annealing or co-evaporation methods, and the film formation is usually limited to either normal or inverted device architecture only.…”
Section: Introductionmentioning
confidence: 99%