2018
DOI: 10.1088/1757-899x/374/1/012020
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Aluminum Coating Influence on Nitride Layer Performance Deposited by MO-CVD in Fluidized Bed on Austenitic Stainless Steel Substrate

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Cited by 4 publications
(5 citation statements)
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“…The latter in situ formed Al x M y phase could be tentatively assigned to Al 25 Ni 75 . [ 55 ] Although, the shift of Li 1s and Mn 2p 3/2 peaks to lower binding energies (as shown in Table S2, Supporting Information) compared to their values measured in the pristine (uncoated) material can point to some chemical interactions or ion exchange of Al with Li and Mn, in the outermost surface layer. It should be noted that a probable formation mechanism of the hypothesized AlNi alloy during ALD process would definitely be complex and questionable (beyond the scope of this work).…”
Section: Resultsmentioning
confidence: 99%
“…The latter in situ formed Al x M y phase could be tentatively assigned to Al 25 Ni 75 . [ 55 ] Although, the shift of Li 1s and Mn 2p 3/2 peaks to lower binding energies (as shown in Table S2, Supporting Information) compared to their values measured in the pristine (uncoated) material can point to some chemical interactions or ion exchange of Al with Li and Mn, in the outermost surface layer. It should be noted that a probable formation mechanism of the hypothesized AlNi alloy during ALD process would definitely be complex and questionable (beyond the scope of this work).…”
Section: Resultsmentioning
confidence: 99%
“…The first step was the introduction of the Al precursor; the low-energy metalorganic bonds can be broken at relatively low temperatures (~200-250 • C) [7,8]. The ion formed as a result will connect with the surface oxygen: Then, the chamber is purged and hydrazinium chloride is introduced.…”
Section: Discussionmentioning
confidence: 99%
“…Being such an attractive semi-conductive material, it is well expected for there to be a plethora of studies and reports featuring AlN deposited by a variety of multiple tools (magnetron sputtering, ion-beam deposition, metalorganic vapor-phase epitaxy etc.) [7][8][9][10][11]. This particular paper focuses on the atomic layer deposition (ALD) method.…”
Section: Introductionmentioning
confidence: 99%
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“…Three times tempering provides the best properties of tool steels [13,14]. At the first tempering the retained austenite is destabilized [15][16]. Second tempering is performed to obtain the desired hardness based on the steel grade tempering diagram and it is possibly further transformation of retained austenite to martensite.…”
Section: Fig 2 the Hardness Of Martensite As A Function Of Carbon Contentmentioning
confidence: 99%