Alternative smoothing techniques to mitigate EUV substrate defectivity

Teki, Ranganath; Kadaksham, Arun John; House, Matt; Harris-Jones, Jenah; Ma, Anna; Babu, S. V.; Hariprasad, A; Dumas, Paul; Jenkins, R.G.; Provine, J.; Richmann, Annika; Stowers, Jason K.; Meyers, Stephen T.; Dietze, Uwe; Kusumoto, Tetsuo; Yatsui, Takashi; Ohtsu, M.; Goodwin, Frank

doi:10.1117/12.916497

Cited by 9 publications

(5 citation statements)

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“…Since DPs are always created at the tips of the bump on the material surface under light irradiation, the present autonomous etching has been applied to smoothing of a variety of surfaces and materials: the side surface of a diffraction grating [30], the surface of a photomask used for conventional ultraviolet lithography [31], and the surfaces of GaN crystals [32], transparent ceramics [33], and diamonds [34].…”

Section: Technology That Uses Neither Fiber Nor Aperturementioning

confidence: 99%

Perspective on an Emerging Frontier of Nanoscience Opened up by Dressed Photon Studies

Sakuma,

Ojima,

Ohtsu

2023

Nanoarchitectonics

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The core parts of developing dressed photon (DP) research that require advanced knowledge of highly mathematical quantum field theory and their potentially important impacts on the wide spectrum of long-term scientific activities in general, not necessarily restricted to those in the natural science sector, are succinctly explained in this article. Although a considerable number of remarkable technological achievements in the field of nanophotonics have been attained by utilizing DP phenomena, from the theoretical viewpoint, they remain enigmatic, as in the case of dark matter and energy in cosmology. Under such circumstances, an intriguing working hypothesis (WH) for DPs is proposed by the authors of this article through a combination of Ojima’s micro-macro duality theory and the Greenberg-Robinson theorem, claiming that the space-like momentum contribution is an inevitable element for quantum field interactions to occur. Note that, as the Schrödinger’s cat thought experiment clearly shows, the widespread common quantum mechanics knowledge is incapable of explaining how the invisible quantum world is connected to our familiar visible classical world. In the above-mentioned WH, the main reason why we cannot explain either DPs or dark entities in cosmology is shown to have roots in the fact that the prevailing theories have not revealed an important role of spacelike momentum in connecting the quantum and classical worlds. Our new WH further shows that the entire universe is connected by an instantaneous spacelike entropic spin network, as in the case of quantum spin entanglement explained in mainstream physics. Since such a network may have a close relation with the nonlocal consciousness field, which seems to be the final frontier of physics, our perspective on such a possibility is briefly given in the final section of this paper.

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Section: Technology That Uses Neither Fiber Nor Aperturementioning

confidence: 99%

Perspective on an Emerging Frontier of Nanoscience Opened up by Dressed Photon Studies

Sakuma,

Ojima,

Ohtsu

2023

Nanoarchitectonics

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“…These included a convex surface, a concave surface, and the inner surface of a cylinder. As an example, this etching has smoothed the side surface of a diffraction grating composed of parallel linear corrugated patterns 64 and the surface of a photo-mask used for conventional ultraviolet lithography 65 . Furthermore, a variety of materials have been smoothened, such as the surfaces of GaN crystals 66 , transparent ceramics 67 , and diamonds 68 .…”

Section: Nano-fabrication Technologymentioning

confidence: 99%

<p style="text-align: left;">History, current developments, and future directions of near-field optical science

Ohtsu¹

2020

OEA

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This paper reviews the science of the optical near-field (ONF), which is created and localized in a nanometer-sized material (NM) or on its surface. It is pointed out that work on near-field optics was started in order to break through the diffraction limit in optical microscopy and had already come to an end without giving answers to the essential questions on the origin of the near-field optical interaction. However, recent studies have reincarnated these studies and identified the ONF as an off-shell quantum field. Based on this identification, a novel science called off-shell science has started on the basis that the dispersion relation between energy and momentum is invalid for the ONF. This quantum field is called the dressed photon because it is created as a result of the interaction between photons and electrons (or excitons) in a NM and, thus, it accompanies the energies of electrons or excitons. In reviewing current developments, this paper presents fifteen novel phenomena that are contrary to the common views in conventional optical science. Novel technologies developed by applying these phenomena are also reviewed. These include: nanometer-sized optical devices, nano-fabrication technology, and energy conversion technology. High-power Si light emitting diodes, Si lasers, and SiC polarization rotators are reviewed as examples of electrical to optical energy conversion. For future directions, this paper also reviews novel theoretical studies that have commenced recently by relying on physical and mathematical bases.

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“…Some improvements using fine polishing have been made to minimize the quartz glass defects, [5][6][7] and other extraordinary processes based on new concepts are being investigated. [8][9][10] Recently, nanoimprinting technology has been attracting considerable attention as one of the most useful fabrication techniques for simple and low-cost surface nanopatterning and smoothing of glassy materials. [11][12][13][14] For example, a surface smoothing method using a thermal nanoimprinting technology with an atomically stepped sapphire mold (α-Al 2 O 3 single crystal) with atomically flat surfaces having 0.2-nm-high atomic steps formed via atom migration has been investigated for reducing the surface energy during thermal annealing.…”

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confidence: 99%

Atomic step patterning on quartz glass via thermal nanoimprinting

Suga¹,

Yoshimoto

Okuyama

et al. 2015

Jpn. J. Appl. Phys.

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A new surface smoothing method using thermal nanoimprinting technology with a 0.2-nm-high atomically stepped sapphire mold has been investigated for quartz glass with a glass transition temperature (T g ) above 1000 °C. Atomic-scale patterning of approximately 0.1-nm-high step arrays has been achieved on the quartz glass. Imprinting was performed at 1.3 MPa and 1000 °C with loading for 10 min, and postannealing at 1000 °C for 180 min in vacuum was found to partially smooth the atomically stepped morphology of the glass surface.

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Alternative smoothing techniques to mitigate EUV substrate defectivity

Cited by 9 publications

References 0 publications

Perspective on an Emerging Frontier of Nanoscience Opened up by Dressed Photon Studies

Perspective on an Emerging Frontier of Nanoscience Opened up by Dressed Photon Studies

<p style="text-align: left;">History, current developments, and future directions of near-field optical science

Atomic step patterning on quartz glass via thermal nanoimprinting

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