AlSiC spherical optical element surface shape detection

Abstract

The AlSiC spherical optical element is one of the basic optical elements preferred in modern optical systems. Spherical optical systems not only occupy a leading position in traditional civilian products such as digital cameras and medical devices, but also play an irreplaceable important role in high-tech frontier fields such as lithographic objectives and highpower laser drivers. A theoretical model is established and the mathematical relationship between the standard mirror square focus, the reference plane and the measured sphere is analyzed by using the two-sided sphere method. The experiment verifies the feasibility of using 4mm RMS reference plane to detect 1mmAlSiC RMS surface. The absolute root mean square of the measured surface is about 1mm, and the variation range is ±0.15nm. The absolute root-meansquare measurement of the reference plane is about 4.2mm, and the variation range is ±0.2mm.