AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

Choujaa, Abdelkrim; Tirole, N.; Bonjour, C.; Martin, G.; Hauden, D.; Blind, P.; Cachard, A.; Pommier, Carolyn J. S.

doi:10.1016/0924-4247(94)00886-m

Cited by 37 publications

(17 citation statements)

References 8 publications

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“…On the other hand, AlN is a material that even thought it has not been used extensively as a substrate for chemical sensor and biosensor development, it has been utilized for the development of shear mode acoustic biosensors [86,87].…”

Section: Gan and Iii-nitridesmentioning

confidence: 99%

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Novel semiconductor materials for the development of chemical sensors and biosensors: A review

Chaniotakis

Sofikiti

2008

Analytica Chimica Acta

129

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Section: Gan and Iii-nitridesmentioning

confidence: 99%

“…AlN [84][85][86][87][88] GaAs [89] netic interference (EMI), while the devices based on them can operate at higher frequencies. This unique chemical, physical and mechanical stability make these new semiconductor materials ideal for the development of specific chemical sensor and biosensor systems.…”

Section: New Semiconductor Substratesmentioning

confidence: 99%

Novel semiconductor materials for the development of chemical sensors and biosensors: A review

Chaniotakis

Sofikiti

2008

Analytica Chimica Acta

129

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“…This membrane can be composed of any material. In order to excite the acoustic modes, the membrane can either be piezoelectric by itself [79][80][81], or may be covered with a piezoelectric film such as zinc oxide [30,82], lead zirconate titanate [41], or aluminum nitride [83]. However, because of its excellent mechanical properties and its ability to be precisely structured by standard micromachining processes, single-crystal silicon is most often chosen (see Section 2.…”

Section: Substratesmentioning

confidence: 99%

Microacoustic Sensors for Liquid Monitoring

et al. 2001

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In recent years, much effort has been expended to developing miniaturized, reliable sensors for measuring physical and chemical liquid properties. Microacoustic devices may be employed to determinate physical quantities perturbing the propagation conditions of the acoustic wave, even in liquid environments. For liquid sensors, acoustic modes with shear polarization are often used in order to avoid radiation losses. Examples are shear bulk modes, surface skimming bulk waves, shear-horizontal acoustic plate modes, and Love modes. Furthermore, modes with sagittal polarization may be applied if their phase velocity is sufficiently lower than the sound velocity in the adjacent liquid. General interactions between acoustic waves and liquids are viscous coupling, acoustoelectric effects, and mass loading. The resulting changes in device frequency and attenuation may be utilized for sensing purposes.The general advantages of microacoustic sensors are high sensitivity, simple fabrication, and quasidigital frequency readout. Hence, a wide variety of devices based on different modes for very different applications has been discussed in the relevant literature. The aim of this review is to provide a systematic overview of microacoustic sensors particularlay suited for operation in liquids.First, we provide a brief introductionto surfaceacousticwave devices and the underlying physics, basic microacoustic structures, and general measurement techniques. A description of the mechanisms of interaction between liquids and acoustic waves is then followed by a comprehensive survey covering the different types of microacoustic liquid sensors, with emphasis on the mode-specific device properties. Thereafter, aspects of material selection and device fabrication are summarized. Lastly, an overview is given indicating where microacoustic liquid sensors have already been put into practice and where their application may be expected in the near future.

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“…So far, the most common configurations for piezoelectric electro-acoustic sensors have been the bulk acoustic wave (BAW) devices and surface acoustic wave (SAW) devices. In the continuation of this discussion the focus will be on the BAW device, specifically the FBAR, due to the high domination for AlN, but also SAW and plate (Lamb) wave devices have been suggested for sensor applications (Caliendo and Imperatori 2003;Choujaa et al 1995;Duhamel et al 2006).…”

Section: Different Acoustic Vibration Modes In Solidsmentioning

confidence: 99%

Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitations

Wingqvist

2012

Microsyst Technol

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Sputter deposited aluminum nitride (AlN) thin films have played a central role for the successful development of the thin film electro-acoustic technology. The development has been primarily driven by one device-the thin film bulk acoustic resonator, with its primary use for high frequency filter applications for the telecom industry. Recently, increased piezoelectric properties in AlN through the alloying with scandium nitride have been identified both experimentally and theoretically. This opens up new possibilities for the thin film electro-acoustic technology.Here expectations and discussions are presented on acoustic FBAR sensor performance when based on AlN as well as on such AlN alloys to identify possible benefits and limitations. Inhere, the distinction is made between direct and in-direct (acoustic) use of the piezoelectric effect for sensor applications. These two approaches are described and compared in view of their advantages and possibilities. Especially, the indirect (or acoustic) use is identified as interesting for its versatility and good exploitation of the thin film technology to obtain highly sensitive sensor transducers. It is pointed out that the indirect approach can well be obtained internally in the piezoelectric material structure. Original calculations are presented to support the discussion.

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AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

Cited by 37 publications

References 8 publications

Novel semiconductor materials for the development of chemical sensors and biosensors: A review

Novel semiconductor materials for the development of chemical sensors and biosensors: A review

Microacoustic Sensors for Liquid Monitoring

Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitations

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