AlN-based MEMS devices for vibrational energy harvesting applications

Bertacchini, Alessandro; Scorcioni, S.; Dondi, D.; Larcher, Luca; Pavan, Paolo; Todaro, M. T.; Campa, A.; Caretto, G.; Petroni, Simona; Passaseo, A.; Vittorio, Massimo De

doi:10.1109/essderc.2011.6044220

Cited by 17 publications

(4 citation statements)

References 6 publications

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“…Recently, MEMS technologies have been applied towards the development of integrated energy harvesters, and many piezoelectric MEMS energy harvesters have been developed (Aktakka 2012;Beeby, Tudor, and White 2006;Bertacchini et al 2011;Defosseux et al 2012;Durou et al 2010;Elfrink et al 2009aElfrink et al , 2009bElfrink et al , 2010Erturk and Inman 2008;Fang et al 2006;Hirasawa et al 2010;Isarakorn et al 2011;Jeon et al 2005;Lee et al 2009;Lei et al 2011;Marzencki et al 2007;Massaro et al 2011;Miller et al 2011;Muralt et al 2009a;Park, Park, and Lee 2010;Rabaey 2003a, 2003b;Shen et al 2008;Van Schaijk et al 2008;Xu et al 2012b;Yen et al 2011). Useful metrics in comparing these devices are their active area, active volume, resonant frequency, harvested power and power densities in volume or area.…”

Section: Review Of Piezoelectric Energy Harvestingmentioning

confidence: 99%

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Priya

Song

Zhou

et al. 2017

Energy Harvesting and Systems

328

144

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Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly assembly for microsensors/microsystems and provide various mechanisms for recharging the batteries, thereby, moving us closer towards batteryless wireless sensors systems and networks. In order to achieve practical implementation of this technology, a fully assembled energy harvester on the order of a quarter size dollar coin (diameter=24.26 mm, thickness=1.75 mm) should be able to generate about 100 μW continuous power from low frequency ambient vibrations (below 100 Hz). This paper reviews the state-of-the-art in microscale piezoelectric energy harvesting, summarizing key metrics such as power density and bandwidth of reported structures at low frequency input. This paper also describes the recent advancements in piezoelectric materials and resonator structures. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed and MEMS processes for these new classes of materials are being investigated. Non-linear resonating beams for wide bandwidth resonance are also reviewed as they would enable wide bandwidth and low frequency operation of energy harvesters. Particle/granule spray deposition techniques such as aerosol-deposition (AD) and granule spray in vacuum (GSV) are being matured to realize the meso-scale structures in a rapid manner. Another important element of an energy harvester is a power management circuit, which should maximize the net energy harvested. Towards this objective, it is essential for the power management circuit of a small-scale energy harvester to dissipate minimal power, and thus it requires special circuit design techniques and a simple maximum power point tracking scheme. Overall, the progress made by the research and industrial community has brought the energy harvesting technology closer to the practical applications in near future.

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Section: Review Of Piezoelectric Energy Harvestingmentioning

confidence: 99%

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Priya

Song

Zhou

et al. 2017

Energy Harvesting and Systems

328

144

View full text Add to dashboard Cite

show abstract

Section: Review Of Piezoelectric Energy Harvestingmentioning

confidence: 99%

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Priya¹,

Song²,

Zhou³

et al. 2019

Energyo

View full text Add to dashboard Cite

Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly assembly for microsensors/microsystems and provide various mechanisms for recharging the batteries, thereby, moving us closer towards batteryless wireless sensors systems and networks. In order to achieve practical implementation of this technology, a fully assembled energy harvester on the order of a quarter size dollar coin (diameter = 24.26 mm, thickness = 1.75 mm) should be able to generate about 100 μW continuous power from low frequency ambient vibrations (below 100 Hz). This paper reviews the state-of-the-art in microscale piezoelectric energy harvesting, summarizing key metrics such as power density and bandwidth of reported structures at low frequency input. This paper also describes the recent advancements in piezoelectric materials and resonator structures. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed and MEMS processes for these new classes of materials are being investigated. Nonlinear resonating beams for wide bandwidth resonance are also reviewed as they would enable wide bandwidth and low frequency operation of energy harvesters. Particle/granule spray deposition techniques such as aerosol-deposition (AD) and granule spray in vacuum (GSV) are being matured to realize the meso-scale structures in a rapid manner. Another important element of an energy harvester is a power management circuit, which should maximize the net energy harvested. Towards this objective, it is essential for the power management circuit of a small-scale energy harvester to dissipate minimal power, and thus it requires special circuit design techniques and a simple maximum power point tracking scheme. Overall, the progress made by the research and industrial community has brought the energy harvesting technology closer to the practical applications in near future.

show abstract

“…This means that energy harvesting systems and applications have to deal with very limited power levels, since optimized electro-mechanical designs with macro-scale transducers yield power densities as low as 10-100 W/cm 3 in many practical cases [5]. In addition, the current trend is to further shrink down transducers with MEMS fabrication processes [6] [7], with available power levels down to few W.…”

Section: Introductionmentioning

confidence: 99%