Almost zero reflectance of a silicon oxynitride/porous silicon double layer antireflection coating for silicon photovoltaic cells

Abstract

Reflectance spectrum calculations for a silicon oxynitride (SiO x N y )-porous silicon (PS) double layer antireflection coating is performed using the matrix method. The results are compared with the corresponding spectrum of diamond-like carbon (DLC)/PS and SiO 2 /TiO 2 double layer coatings. A lower reflectance in the visible and infrared regions of the solar spectrum for the SiO x N y /PS double layer is obtained, especially in the 450-600 nm spectral range (with a flat reflectance response remaining as low as ≈ 0.01%), which corresponds to the maximum intensity of solar irradiation. These findings are of importance in solar cell applications.

New design graded refractive index antireflection coatings for silicon solar cells

“…3 and 4, the calculated reflectance spectrum of nanoporous silicon dioxide (SiO 2 ) layer/SiO 2 /SiO x N y /PS (or other black silicon) multilayer ARC is broader than that of double-layer SiO x N y /PS ARCs, which has the best result as an ARC on the surface of silicon in all double layers ARC so far. 9 The reflectance of the double-layer SiO x N y /PS ARC at a low value for a spectral range from the wavelength of 420 nm to 800 nm, while the remaining part of the response is located well above reaching values up to 15% and at 350 nm wavelength.…”

A Mini Review: Antireflective Coatings Processing Techniques, Applications and Future Perspective

“…Bilayer AR SiO 2 coating on a silicon substrate can reduce the reflectance (<0.01%) in the visible region for solar cell applications [45] . However, the limitation of this coating restricts their usage at broader scale due to top porous, fragile nature of coating which has weak mechanical strength.…”

Numerical calculation of the reflectance of sub-wavelength structures on silicon nitride for solar cell application

“…Many studies have been reported for double layer antireflection (DLAR) coatings because single layer antireflection (SLAR) coatings are not able to cover a broad range of the solar spectrum [4][5][6][7][8]. Unfortunately, these multilayer antireflection coatings (ARCs) are expensive to fabricate owing to the stringent requirement of high vacuum, material selection, and layer thickness control.…”