2003
DOI: 10.1016/s0257-8972(03)00612-1
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Alloyed and hydrogenated diamond-like carbon thin films deposited by a new high performance microwave low pressure plasma source

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Cited by 11 publications
(3 citation statements)
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“…Various concepts for the design and deposition of multifunctional amorphous carbon coatings and their properties have been reported in detail in previous publications. [63][64][65][66][67][68] All experiments were realised with as-deposited carbon coatings which naturally is terminated by various functional groups building a thin C-O-H layer.…”
Section: Methodsmentioning
confidence: 99%
“…Various concepts for the design and deposition of multifunctional amorphous carbon coatings and their properties have been reported in detail in previous publications. [63][64][65][66][67][68] All experiments were realised with as-deposited carbon coatings which naturally is terminated by various functional groups building a thin C-O-H layer.…”
Section: Methodsmentioning
confidence: 99%
“…3. Here, 'smart' combinations of coating composition (achievable 28 Unified and specific tribological challenges for carbon coated components and devices [76][77][78] or possibly B) and optimised internal bonding (control of sp 2 /sp 3 ratios), coupled with appropriate deposition and etching parameters in combination with vacuum annealing, should enable the mitigation of detrimental internal stresses and greatly improved interfacial fracture toughness. It should also become possible to create specific designs of surface dangling bonds to enable efficient chemical bonding with base oil and tribolayers yielded from tribochemical reaction with low environmental impact oil additives designed for the man made lubricated contact operating environment of automotive engines.…”
Section: Potential Of Surface Engineered Low Friction Autoengine Compmentioning
confidence: 99%
“…3) These films have been expected to possess excellent properties, such as high-mechanical hardness, low friction, and biocompatibility. [4][5][6] A number of decomposition methods for C 2 H 2 have so far been reported: examples of such methods are those involving the use of radio-frequency, 7,8) MW, [9][10][11] and electron-cyclotron resonance (ECR) 12,13) plasmas. The discussions on the mechanism of the decomposition of C 2 H 2 have been based on mass spectrometry, 14,15) OES, 14,16) and laser spectroscopy.…”
Section: Introductionmentioning
confidence: 99%