Alleviation of overlap interferences for determination of potassium isotope ratios by inductively coupled plasma mass spectrometry

Abstract

is appropriate for samples prepared by other methods. Finally, it is proposed that the desired properties of the BPSG film such as reflow angle and dielectric properties might be estimated from the IR spectra using these multivariate calibration methods. Physical properties (including softening temperature and thermal expansion coefficient) of bulk glasses have previously been estimated from their IR spectra using PLS methods (28). Future studies in this laboratory will focus on addressing these points. ACKNOWLEDGMENTThe author acknowledges . T. Kay and G. R. Iben for providing the BPSG samples. A. R. Mahoney made the ellipsometer measurements, M. Gonzales and W. B. Chambers performed the ICP analyses, and R. M. Merrill conducted the IC analyses. C. E. Case collected the IR data and aided in the computer analysis of the spectral data. E. V. Thomas, R. B. Pettit, and H. L. Tardy contributed with helpful discussions.

A status report on helium inductively coupled plasma mass spectrometry

“…For the work described in this report, we reduced interface-related discharges by operating the He ICP only at 600 W. The plasma gas and injector gas flow rates then were optimized for He ICPMS. This condition is comparable to the so called "Cold Plasma" condition investigated for Ar ICPMS [57][58][59]. At 600 W, no visual pinch discharge was observed for He ICPMS.…”

Inductively coupled plasma mass spectrometry

“…The ArH+ peak also obscures ions of mlz = 41. This mass region would be very useful for K isotope ratio measurements and some recent research indicates that these background peaks can be removed either by altering plasma operating conditions (167) or by substitution of a flame-ionization source (168).…”

Dynamic Reaction Cell ICPMS for Trace Metal Analysis of Semiconductor Materials

“…The first breakthrough to reduce some of the more severe polyatomic overlaps was the use of low-temperature plasma to minimize the argon-and matrix-based polyatomic species that form under normal plasma conditions (1000-1400 W rf power and 0.8-1.0 L/min nebulizer gas flow) (3). By using cool plasma conditions (500-800 W rf power, 1.5-1.8 L/min nebulizer gas flow, and, on some instruments, an increase in sampling depth), ionization in the plasma is changed so that many of these interferences are dramatically reduced and significantly improved detection limits are achieved (4).…”

“…Furthermore, if there are any impurities in the Instrument detection limits in potable water measured on a collision cell ICPMS using kinetic energy discrimination (21). 3 Detection limits and BEC values from an ICPMS fitted with a DRC using mass discrimination (13).…”