All-digital 3-dimensional profilometry of nano-scaled surfaces with spatial light modulators

Structured light for topography measurements in the nanometric regime

“…19 Approaches include chromatic confocal microscopy, 20 phase measuring deflectometry, 21,22 phase shifting interferometry, 23 digital holographic microscopy. 24,25 Despite their proved advantages, the performance of optical methods is in general affected by instabilities in the system, 23 for instance caused by vibrations, and, in the case of reflective samples, usually require a reference optical flat, therefore hindering their potential. The search for novel techniques that are faster, more robust or with straight forward implementation thus continues.…”

Advanced optical holographic imaging technologies

“…The research group led by Juodkazis -Smith, Ng, Han, Katkus, Anand and Glazebrook, reported an interdisciplinary research work connecting computational imaging and advanced manufacturing [3]. The research group led by Forbes consisting of Rodríguez-Fajardo, Guzman, Mouane,Wamwangi, Sideras-Haddad and Roux reported a novel interferometry-based topography measurement method that is capable of measuring reflective as well as partially reflective surfaces [4]. A rapid computer generated holography calculation method based on deep learning was reported to overcome the limitations of Gerchberg-Saxton algorithm by the research group led by Ito-Ishii, Shimobaba, Blinder, Birnbaum, Schelkens and Kakue [5].…”