2007
DOI: 10.1021/jp066101m
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Alkylperfluorosilane Self-Assembled Monolayers on Aluminum:  A Comparison with Alkylphosphonate Self-Assembled Monolayers

Abstract: The performance of micro- and nanoelectromechanical systems depends on the surface properties of the substrate material, such as chemical composition, roughness, friction, adhesion, and wear. Substrates of aluminum deposited onto Si (Al/Si) have been chemically reacted with perfluorodecyldimethylchlorosilane (PFMS), octadecylphosphonic acid (ODP), decylphosphonic acid (DP), octylphosphonic acid (OP), and perfluorodecylphosphonic acid (PFDP) and then characterized by X-ray photoelectron spectroscopy (XPS), cont… Show more

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Cited by 87 publications
(79 citation statements)
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References 38 publications
(57 reference statements)
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“…The Al2p peak after 40 min of sputtering (Figure 10b) was deconvoluted into three components. The curves centered at 72.9 and 74.2 eV have been attributed to Si-O-Al linkages [40] and oxide aluminum [40,41],respectively, whereas the component at 71.2 eV has been attributed to metallic contribution [16,40,42]. Hoque et al [16] identified peaks centered at 71. also contains contributions from the P-O-Al bonds.…”
Section: Xps Analysis Of Aa2024 Coated With Vtms/teos (3v) and Vtms/tmentioning
confidence: 99%
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“…The Al2p peak after 40 min of sputtering (Figure 10b) was deconvoluted into three components. The curves centered at 72.9 and 74.2 eV have been attributed to Si-O-Al linkages [40] and oxide aluminum [40,41],respectively, whereas the component at 71.2 eV has been attributed to metallic contribution [16,40,42]. Hoque et al [16] identified peaks centered at 71. also contains contributions from the P-O-Al bonds.…”
Section: Xps Analysis Of Aa2024 Coated With Vtms/teos (3v) and Vtms/tmentioning
confidence: 99%
“…On the other hand, phosphonic acids are an important class of self-assembled molecules with high ability to react with a range of metal oxide surfaces [16], which has been proposed as a new method for corrosion protection [17][18][19]. The formation of phosphonate layer was shown to be a spontaneous process that could be accomplished by simple immersion of the metal into the phosphonic acid solution [17].…”
Section: Introductionmentioning
confidence: 99%
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“…2͑A͒. Other combinations of adsorbates and substrates include chlorosilanes on silicon oxide, 77,78 aluminum, 79 and titanium; 80 phosphonic acids on aluminum 79 or titanium; 81,82 and catechol derivatives on titanium. 83 Although alkanethiol SAMs on gold are most commonly studied, they suffer from instability of the thiolgold bond leading to facile exchange of the adsorbates.…”
Section: A Self-assembled Monolayersmentioning
confidence: 99%
“…Alkylphosphonic acids are also an important class of SAM molecules because of their ability to assemble on a number of oxide surfaces, such as tantalum oxide, aluminum oxide, silicon oxide, iron oxide, copper oxide, and mica, and to form robust surface films [78][79][80][81][82][83][84][85][86][87][88][89][90][91][92]. Compared to SAMs of fatty acids, alkanethiols, and alkylsilanes, which have been studied extensively, phosphonic acid-based SAMs have not received much attention [84].…”
Section: Interactions Between Head Groups and Substrate Surfacesmentioning
confidence: 99%