2010
DOI: 10.1016/j.jcrysgro.2010.07.021
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AlGaAs/GaAs/AlGaAs quantum wells as a sensitive tool for the MOVPE reactor environment

Abstract: We present in this work a simple Quantum Well (QW) structure consisting of GaAs wells with AlGaAs barriers as a probe for measuring the performance of arsine purifiers within a MetalOrganic Vapour Phase Epitaxy system.Comparisons between two different commercially available purifiers are based on the analysis of low temperature photoluminescence emission spectra from thick QWs, grown on GaAs substrates misoriented slightly from (100). Neutral excitons emitted from these structures show extremely narrow linewid… Show more

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Cited by 42 publications
(36 citation statements)
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References 34 publications
(54 reference statements)
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“…18 The growth pressure was 80 millibars, the V/ III ratio was 220, and the wafer surface temperature was 650 C as measured by emissivity-corrected pyrometry. HfO 2 layers were deposited using tetrakis dimethylamido hafnium (TDMA-Hf) and H 2 O precursors in a Picosun # ALD reactor at 250 C, with a pulse/purge time of 0.1 s TDMA-Hf-20 s N 2 -0.1 s H 2 O-20 s N 2 and ultra-high purity N 2 as both carrier and purging gas (200 sccm).…”
Section: Methodsmentioning
confidence: 99%
“…18 The growth pressure was 80 millibars, the V/ III ratio was 220, and the wafer surface temperature was 650 C as measured by emissivity-corrected pyrometry. HfO 2 layers were deposited using tetrakis dimethylamido hafnium (TDMA-Hf) and H 2 O precursors in a Picosun # ALD reactor at 250 C, with a pulse/purge time of 0.1 s TDMA-Hf-20 s N 2 -0.1 s H 2 O-20 s N 2 and ultra-high purity N 2 as both carrier and purging gas (200 sccm).…”
Section: Methodsmentioning
confidence: 99%
“…The structures, all capped with a GaAs layer, were grown on (001) GaAs perfectly oriented or slightly misoriented substrates. 17 The precursors were trimethylgallium (TMGa), trimethyaluminum (TMAI), trimethylindium (TMI), and arsine (AsH 3 ) or tertiarybutylarsine (TBA). Growth conditions and structural design varied from sample to sample; relevant details are referenced in the text when a particular example is discussed.…”
Section: Methodsmentioning
confidence: 99%
“…During growth, particular care is taken to monitor unintentional impurity levels. [9][10][11] The QDs are self-formed at the bottom of the inverted pyramids during deposition of the In 0.15 Ga 0.85 As layer due to capillarity effects and decomposition-rate anisotropy. 12,13 Before and after growth of the QD layer, an Al 30 Ga 70 As barrier layer was grown (see the inset of Fig.…”
Section: Samplementioning
confidence: 99%