Al2O3−BaTiO3 nanolaminates fabricated by multistationary target pulsed laser deposition with in situ ellipsometry

Jones, John G.; Boeckl, John; Smith, Steven R.; Landis, G.; Murphy, Neil R.; Hu, Zhongqiang; Bowers, Cynthia T.; Stutz, C. E.

doi:10.1117/1.jnp.11.043506

Cited by 2 publications

(3 citation statements)

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“…The facilities for energy beam-assisted processing typically include a beam source and all the other components as found for vapor deposition [72,103]. The target materials could be pure metals, metallic alloys, polymers, and ceramics [104]. Sometimes more than one target may be used simultaneously to deposit multilayered complex coatings.…”

Section: Energy Beam Techniquesmentioning

confidence: 99%

“…Sometimes more than one target may be used simultaneously to deposit multilayered complex coatings. For example, Jones et al [104] deposited layered oxide materials having alternating repeated layer thicknesses of 10 nm or less. Such complex and fine structures with sharp interfaces are usually hard to fabricate.…”

Section: Energy Beam Techniquesmentioning

confidence: 99%

“…Such complex and fine structures with sharp interfaces are usually hard to fabricate. Nanostructured oxide thin films with repeated layers of two different oxide materials were generated by pulsed-laser deposition during which two independent stationary targets consisting of Al 2 O 3 and BaTiO 3 were used [104]. The deposition rate of PLD varies with the types of beam, atmosphere in the chamber, temperature of the substrate, the magnitude of the laser power, and the oxygen background gas pressure level in the chamber [105].…”

Section: Energy Beam Techniquesmentioning

confidence: 99%

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A Review on the Processing Technologies for Corrosion Resistant Thermoelectric Oxide Coatings

Gan

2021

Coatings

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Oxide coatings are corrosion resistant at elevated temperatures. They also show intensive phonon scattering and strong quantum confinement behavior. Such features allow them to be used as new materials for thermoelectric energy conversion and temperature measurement in harsh environments. This paper provides an overview on processing thermoelectric oxide coatings via various technologies. The first part deals with the thermoelectricity of materials. A comparison on the thermoelectric behavior between oxides and other materials will be made to show the advantages of oxide materials. In the second part of the paper, various processing technologies for thermoelectric metal oxide coatings in forms of thin film, superlattice, and nanograin powder will be presented. Vapor deposition, liquid phase deposition, nanocasting, solid state approach, and energy beam techniques will be described. The structure and thermoelectric property of the processed metal oxide coatings will be discussed. In addition, the device concept and applications of oxide coatings for thermoelectric energy conversion and temperature sensing will be mentioned. Perspectives for future research will be provided as well.

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Section: Energy Beam Techniquesmentioning

confidence: 99%

Section: Energy Beam Techniquesmentioning

confidence: 99%