Al-Mo nanocomposite functionalization for membrane-based resonance detection of bovine Herpesvirus-1

Hurk, Remko van den; Baghelani, Masoud; Chen, Jie; Daneshmand, Mojgan; Evoy, Stéphane

doi:10.1016/j.sna.2019.06.047

Cited by 7 publications

(2 citation statements)

References 32 publications

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“…Due to similar geometries, we can also mention the use of suspended membranes in this section. Although they are not supported by four beams, this type of sensing platform is used for the attachment of samples such as viruses [76]. The fabrication process includes chemical vapour deposition for SiN and sputtering for AlMo membranes, reactive ion etching of the patterned layers, and wet etching (KOH) of the silicon layer [77].…”

Section: Suspended Structuresmentioning

confidence: 99%

“…A recent study by van den Hurk et al detected bovine herpesvirus-1 (BHV-1) on a 10 nm-thick AlMo membrane of the resonator. The accumulated mass of BHV-1 varied depending on the membrane coating, with 7 ± 1 ng collecting on an active monoclonal 3D9S antibody-coating and 3.1 ± 0.1 ng on the control antihuman INF-γ antibody-coating [76].…”

Section: Biological Applicationsmentioning

confidence: 99%

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Fabricating Silicon Resonators for Analysing Biological Samples

et al. 2021

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The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.

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Section: Suspended Structuresmentioning

confidence: 99%

Section: Biological Applicationsmentioning

confidence: 99%