2008
DOI: 10.1063/1.2998596
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Air-voids embedded high efficiency InGaN-light emitting diode

Abstract: To improve the light extraction efficiency of InGaN-light emitting diode (LED), inverted hexagonal cone shaped air voids with {10–11} GaN crystal planes were formed between a patterned sapphire substrate and GaN epitaxial layer using a H3PO4-based hot chemical etching method. The air-voids embedded LED showed 12% and 210% higher optical power than a patterned substrate LED and a flat substrate LED, respectively. A ray tracing simulation revealed that the light extraction through the top face of the air-voids e… Show more

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Cited by 77 publications
(43 citation statements)
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“…2(d), we can estimate the average diameter of these air voids is about 100 nm. These embedded air voids shall be able to increase the LEE due to extra light scattering from these air bubbles [25].…”
Section: Resultsmentioning
confidence: 99%
“…2(d), we can estimate the average diameter of these air voids is about 100 nm. These embedded air voids shall be able to increase the LEE due to extra light scattering from these air bubbles [25].…”
Section: Resultsmentioning
confidence: 99%
“…Patterned sapphire substrates (PSSs) 23 or roughening in vertical LEDs (VLEDs) achieve light extraction efficiencies of over 80% today. 24,25 Methods are still under investigation to reduce TIR by surface roughening, 26 substrate patterning, chip shape optimization, and material integrating/embedding. 2 The internal quantum efficiency (IQE), the ratio of generated photons to the electron-hole recombination, was increased by improving the material quality and modification to to LED device structures.…”
Section: The Iii-nitrides For Light-emitting Diodesmentioning
confidence: 99%
“…It is known that most researchers have successfully simulated light extraction in LEDs using the ray-tracing method when they considered LEDs with mixed structure sizes, i.e. some micron-sized structures and some submicron-sized, like our LEDs [14,16,17,19,20], even though they used a strict method such as the finitedifference time-domain (FDTD) method when they considered LEDs with entirely nanoscale structures. The validity for such a use of the ray-tracing method can be explained: The key point in the phenomenon of light extraction with PSSLEDs is the breaking of TIR, so that the light's nature as a ray is more conspicuously considered than as a wave.…”
Section: Resultsmentioning
confidence: 99%
“…Monte Carlo ray-tracing simulations are one of the most [15][16][17][18]. Geometrical optical phenomena in photonic devices can be analyzed using this method, including ray scattering, absorption and transmission in the semiconductor layers, Fresnel losses of the media due to different refractive indices, and the randomly emitted light from the active region of an LED [19].…”
Section: Introductionmentioning
confidence: 99%