Aging of a fluorinated lubricant on bare and DLC-coated silicon-based MEMS

Eapen, Kalathil C.; Patton, Steven T.; Smallwood, Steven A.; Nainaparampil, J. J.; Zabinski, J.S.

doi:10.1016/j.surfcoat.2004.12.031

Cited by 14 publications

(21 citation statements)

References 22 publications

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“…For this, the lubricant film should have mobile components. A good example is Fomblin Zdol Ò , a perfluoropolyether with hydroxyl end groups, widely used in the magnetic hard disc memory industry [15][16][17][18][19][20]. A fraction of Zdol forms a bound layer through hydrogen bonding with the surface oxide groups of the protective carbon coatings on the hard disc, while the unbound Zdol fraction can readily move on the surface.…”

Section: Introductionmentioning

confidence: 99%

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Improved Substrate Protection and Self-Healing of Boundary Lubrication Film Consisting of Polydimethylsiloxane with Cationic Side Groups

2010

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The substrate protection and self-healing capability of a cationic polymer lubricant (CPL) on a silicon oxide surface were tested with a pin-on-disc tribometer and atomic force microscopy (AFM). CPL was made of low molecular weight polydimethylsiloxane (PDMS) containing covalently attached quaternary ammonium cations and iodide counter-anions. CPL was spin-coated on the silicon oxide surface to form a 3-4 nm thick boundand-mobile lubricant layer. The CPL film capable of binding to the SiO 2 surface through ionic interactions is superior in substrate protection than the neutral PDMS film which cannot form the bound layer. The mobile component in the CPL film readily flows into the lubricant-depleted sliding contact region from the surrounding film. The selfhealing capability of CPL via lateral flow is slightly enhanced in humid environments due to water uptake in the film. The 3-4 nm thick CPL film on silicon oxide takes 30-40 s to flow into a *50 lm wide track, which corresponds to an apparent spreading rate of 2-3 9 10 -11 m 2 /s.

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Section: Introductionmentioning

confidence: 99%

“…The spreading rate of a multilayer Zdol film is *1 9 10 -11 m 2 /s [21]. Although proven to work well for carbon materials, Zdol is not ideal for silicon surfaces since it can degrade and produce hydrofluoric acid which can etch SiO 2 surface layers [19,20].…”

Section: Introductionmentioning

confidence: 99%

Improved Substrate Protection and Self-Healing of Boundary Lubrication Film Consisting of Polydimethylsiloxane with Cationic Side Groups

2010

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“…To investigate the chemical reaction in the film deposition process of DLC, we considered five types of carbon atoms on the basis of their coordination number: C (0) , C (1) , C (2) , C (3) , and C (4) . The superscripts indicate the coordination number, and all the deposited carbon atoms are initially C (0) (isolated) state.…”

Section: Parameters For Chemical Reaction Simulationsmentioning

confidence: 99%

“…Diamond-like carbon (DLC) has been applied as surface coatings on a wide variety of mechanical parts because of its remarkable friction and anti-wear properties. For example, DLC film are used as protective film of microelectro-mechanical system (MEMS) devices [1][2] , head-disk interfaces of magnetic hard disks 3) , bearings 4) , and also automotive components 5) . It is generally known that DLC is mainly composed of sp 3 -, sp 2 -hybridized carbons and hydrogen.…”

Section: Introductionmentioning

confidence: 99%

Influences of Film Deposition Condition on Friction of Diamond-Like Carbon Film: A Theoretical Investigation

et al. 2010

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We theoretically investigated influences of film deposition condition on a friction of diamond-like carbon (DLC) film using our developed molecular dynamics method. The method can deal with chemical reactions on the basis of our original stochastic equation. DLC slab model was firstly constructed, and carbon atoms were deposited onto its surface with various kinetic energies (1, 10 and 30 eV) to mimic physical vapor deposition process. Lower sp 3 carbon concentration and density were obtained for the 1 eV case and "subplantation" phenomenon was found for each model. The dynamical friction of the deposited DLC film/iron oxide combination was also simulated. The friction coefficient for the deposited film with kinetic energy of 1 eV was much lower than that of 10 and 30 eV cases due to the friction-induced structural change. The simulations provided us an important insight on DLC film preparation to achieve low friction regime.

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“…Different solid tribological coatings (e.g., high quality amorphous carbon) and thin films (e.g., organic self-assembled monolayers (SAMs)) have been extensively developed [9][10][11][12][13][14][15]. Nevertheless, these lubricant films still have shortcomings in spite of considerable progresses made, for instance, adherence, fluctuation in coefficient of friction (COF), finite wear life, tribo-reactivity, poor thermal conductivity and complex deposition procedures, etc., are the great challenges that the solid coating should face [16]; SAMs organic films may degrade by aging due to their chemistry changes in humid or oxidizing environments, volatility in vacuum environments, and sensitivity to temperature fluctuations [7,17].…”

Section: Introductionmentioning

confidence: 99%

Tribological Characterization of Several Silicon-Based Materials Under Ionic-Liquids Lubrication

Xie

Wang

et al. 2009

Tribol Lett

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The tribological behaviors of three siliconbased materials (low temperature silicon oxide (LTO), polysilicon (Poly Si) and silicon nitride (Si 3 N 4 ) films) under ion liquids (ILs) lubrication have been investigated by varying the applied load and the sliding velocity. An atomic force microscope and a nanoindentor were used to characterize the deposited films, and the worn surfaces after frictional tests were analyzed by an optical microscope, a scanning electron microscope (SEM) with an energy dispersive spectrometer (EDS) and an X-ray photoelectron spectrometer (XPS). The results show the best lubricating properties of the IL lubricants are obtained at the intermediate load of 150 g for the three tribo-pairs. For the Si 3 N 4 /Si 3 N 4 tribo-pair, the coefficients of friction (COFs) and the wear rates under ILs lubrication are larger than those under dry friction. The COF values decrease with sliding velocity, and the COFs of the Si 3 N 4 /Si 3 N 4 tribo-pair are greater than the ones of the other two tribopairs (LTO/Si 3 N 4 and Poly Si/Si 3 N 4 ) at low velocities. The COF of 1-ethyl-3-methylimidazolium tetrafluoroborate is nearly 3 times larger than the other two IL lubricants (1-butyl-2,3-dimethylimidazolium tetrafluoroborate and N-butylpyridinium tetrafluoroborate) for the Si 3 N 4 /Si 3 N 4 tribo-pair. The differences in COFs between the latter two lubricants for the three tribo-pairs are negligible. Different mechanisms of these results have been analyzed in the paper.

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Aging of a fluorinated lubricant on bare and DLC-coated silicon-based MEMS

Cited by 14 publications

References 22 publications

Improved Substrate Protection and Self-Healing of Boundary Lubrication Film Consisting of Polydimethylsiloxane with Cationic Side Groups

Improved Substrate Protection and Self-Healing of Boundary Lubrication Film Consisting of Polydimethylsiloxane with Cationic Side Groups

Influences of Film Deposition Condition on Friction of Diamond-Like Carbon Film: A Theoretical Investigation

Tribological Characterization of Several Silicon-Based Materials Under Ionic-Liquids Lubrication

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