The microstructure of Ag thin films can be controlled by dispersing La 0.9 Sr 0.1 Ga 0.8 Mg 0.2 O 2.9 ͑LSGM͒ nanoparticles, and the Ag-LSGM-composite thin film serves as an excellent low operating temperature solid oxide fuel cells cathode. Here, the microstructure of Ag thin films can also be controlled by dispersing ZrO 2 nanoparticles. By comparing the Ag-ZrO 2 composite thin-film cathode ͑ZrO 2 nanoparticle-dispersed Ag͒ with the Ag-LSGM-composite thin-film cathode ͑LSGM nanoparticledispersed Ag͒, the electrochemical performance of the Ag thin-film cathode is directly related to the grain boundary density in the thin film.Solid oxide fuel cells ͑SOFCs͒ have a high energy-conversion efficiency of more than 50% because they directly convert the chemical energy of the fuels into electrical energy. Because SOFCs have been researched and developed originally for a high temperature operation ͑around 1000°C͒, they have had certain drawbacks such as the fast deterioration of the component materials, high cost of the materials, and a long startup time. For the commercialization of SOFCs, it is important to lower their operating temperature to overcome the above drawbacks. However, as the operating temperature decreases, the performance of SOFCs decreases drastically due to an increase in the internal resistance, especially in the cathode. La 0.6 Sr 0.4 Co 0.2 Fe 0.8 O 3−␦ ͑LSCF͒ is a mixed ionic and electronic conductor. LSCF is one of the most promising cathode materials because LSCF has high ionic and electronic conductivities and a fast oxygen surface exchange. 1,2 However, the ionic conductivity rapidly decreases below 700°C. 3 To reduce the cathode resistance under 600°C, the use of a Ag cathode has been investigated. 4-14 Sasaki et al. and Muranaka et al. noted the high permeability of oxygen through Ag, the high conductivity of Ag, and its high catalytic activity and investigated the use of a Ag thin film as the cathode to realize low temperature operating SOFCs. 7-13 In the Ag thin-film cathode, the oxide ions from the cathode can be transferred into the electrolyte through the entire Ag/electrolyte interface. 4,9 Sasaki et al. fabricated a pure Ag thin-film cathode using the radio-frequency ͑rf͒ magnetron sputtering method. 9 Due to the low melting point of Ag ͑962°C͒, the grains of the pure Ag thin-film cathode grew to 5 m in diameter and holes were formed during annealing in air at 600°C for 100 h. This hole formation results in a decrease in the area of the Ag/electrolyte interface. A film thickness of about 5 m is required to prevent hole formation; however, the cathode resistance of pure Ag increases with increasing film thickness. 9 Muranaka et al. demonstrated the high performance of the Ag-La 0.9 Sr 0.1 Ga 0.8 Mg 0.2 O 2.9 ͑LSGM͒ composite thin-film cathode, in which the dispersed LSGM nanoparticles inhibit the grain growth of Ag. 10,11 As the concentration of the dispersed LSGM nanoparticles increased, the size of the Ag grains in the cathode decreased, and the area specific resistance ͑ASR͒ of the c...