AFM Measurements of the Deformation Kinetics of Silica Oxide Dots Deposited on a Sequentially Nitrided Stainless Steel

Abstract

In this paper, we present the results of plasma nitriding treatments on austenitic stainless steel substrates previously coated with a patterned silicon oxide layer. For this purpose, masks were made by PECVD for the deposition of a silicon oxide layer on polished austenitic AISI 316L samples. For the final nitriding treatment, we used a multi-dipolar plasma providing independent substrate polarization. The interactions between expanded austenite and fixed silicon oxide mask in different shapes (circular and square dots) are observed by atomic force microscopy (AFM) on the same area before and after the nitriding treatment. After this thermochemical treatment, we obtain strong distortions of the dots, in particular at the edges of the larger size dots. The role of elastic deformation, due to the expanded austenitic phase formed by the diffusion of nitrogen under the mask is of primary importance.