2020
DOI: 10.1111/jmi.12908
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AFM and Raman study of graphene deposited on silicon surfaces nanostructured by ion beam irradiation

Abstract: Nanoscale structures were produced on silicon surfaces by low-energy oxygen ion irradiation: periodic rippled or terraced patterns formed spontaneously, depending on the chosen combination of beam incidence angle and ion fluence. Atomic force microscopy image processing and analysis accurately described the obtained nanotopographies. Graphene monolayers grown by chemical vapour deposition were transferred onto the nanostructured silicon surfaces. The interfacial interaction between the textured surface and the… Show more

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Cited by 4 publications
(5 citation statements)
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References 38 publications
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“…Atomic force microscopy (AFM) images in Figure 1a-c show the typical morphology of graphene-covered textured surfaces referred to as GrP40, GrP125, and GrP250. The preparation and characterization of the textured surface is described in previous work [44,45] and in Section S1 Supporting Information. Each textured region comprises long parallel grooves ≈40 nm wide; the grooves′ spacing referred to pitch length (P) varies from 40 ± 4, 125 ± 8, and 250 ± 14 nm.…”
Section: Resultsmentioning
confidence: 99%
“…Atomic force microscopy (AFM) images in Figure 1a-c show the typical morphology of graphene-covered textured surfaces referred to as GrP40, GrP125, and GrP250. The preparation and characterization of the textured surface is described in previous work [44,45] and in Section S1 Supporting Information. Each textured region comprises long parallel grooves ≈40 nm wide; the grooves′ spacing referred to pitch length (P) varies from 40 ± 4, 125 ± 8, and 250 ± 14 nm.…”
Section: Resultsmentioning
confidence: 99%
“…The height profile in Figure 3i contains several sharp peaks resulting from graphene wrinkles, whereas the other height profiles in Figure 3j-l are all smoother. The frequency distributions of the vertical distance R z shown in Figure 3m-p are calculated from Figure 3e-h. [40,41] The vertical distance R z is defined as the distance between the chosen data point and the lowest data point in the image. The distribution in Figure 3n-p has a much less broadening compared with the distribution in Figure 3m, which reflects the fact that the specimens shown in Figure 3f-h have smoother surfaces.…”
Section: Resultsmentioning
confidence: 99%
“…Similar atomic resolution have been also obtained with friction in contact AFM [68]. On the other hand, morphology has been broadly investigated with both AFM and STM and findings have been useful to understand: (1) the evolution of growth processes in organic [69,70], inorganic [71,72], and biological [73][74][75][76][77][78][79][80] structures, for organic structures even in situ and in quasi real time [81,82]; (2) chemical/physical interactions between organic and inorganic matter [83,84]; (3) the aggregation phenomena [85][86][87][88]; (4) effects of chemical [89][90][91][92][93] and physical [94][95][96][97][98][99][100][101][102] processes to modify matter and/or its surface; (5) living organisms [103][104][105]. Morphology and electrical measurements may be also correlated to explain the performances of electronic devices [106][107][108][109][110].…”
Section: Scientific Research Publications and Fundings Of Italian Spm...mentioning
confidence: 99%