AES and XPS study of thin RF-sputtered Ta2O5 layers

Atanassova, E.; Dimitrova, T.; Koprinarova, J.

doi:10.1016/0169-4332(94)00538-9

Cited by 189 publications

(68 citation statements)

References 31 publications

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“…32 In order to achieve such low losses in dielectric mirror coatings, it is a standard procedure to anneal the coatings after fabrication. Annealing leads to homogenization of the oxide layers and improves the stoichiometry of nonperfect oxides, 41 reducing coating losses typically by 10 ppm. This procedure is thus a key step in the process of manufacturing ultra-low-loss mirrors.…”

Section: Annealing Mirrorsmentioning

confidence: 99%

Integrated fiber-mirror ion trap for strong ion-cavity coupling

Brandstätter

McClung

Schüppert

et al. 2013

Review of Scientific Instruments

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We present and characterize fiber mirrors and a miniaturized ion-trap design developed to integrate a fiber-based Fabry-Perot cavity (FFPC) with a linear Paul trap for use in cavity-QED experiments with trapped ions. Our fiber-mirror fabrication process not only enables the construction of FFPCs with small mode volumes, but also allows us to minimize the influence of the dielectric fiber mirrors on the trapped-ion pseudopotential. We discuss the effect of clipping losses for long FFPCs and the effect of angular and lateral displacements on the coupling efficiencies between cavity and fiber. Optical profilometry allows us to determine the radii of curvature and ellipticities of the fiber mirrors. From finesse measurements, we infer a single-atom cooperativity of up to 12 for FFPCs longer than 200 μm in length; comparison to cavities constructed with reference substrate mirrors produced in the same coating run indicates that our FFPCs have similar scattering losses. We characterize the birefringence of our fiber mirrors, finding that careful fiber-mirror selection enables us to construct FFPCs with degenerate polarization modes. As FFPCs are novel devices, we describe procedures developed for handling, aligning, and cleaning them. We discuss experiments to anneal fiber mirrors and explore the influence of the atmosphere under which annealing occurs on coating losses, finding that annealing under vacuum increases the losses for our reference substrate mirrors. X-ray photoelectron spectroscopy measurements indicate that these losses may be attributable to oxygen depletion in the mirror coating. Special design considerations enable us to introduce a FFPC into a trapped ion setup. Our unique linear Paul trap design provides clearance for such a cavity and is miniaturized to shield trapped ions from the dielectric fiber mirrors. We numerically calculate the trap potential in the absence of fibers. In the experiment additional electrodes can be used to compensate distortions of the potential due to the fibers. Home-built fiber feedthroughs connect the FFPC to external optics, and an integrated nanopositioning system affords the possibility of retracting or realigning the cavity without breaking vacuum.

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Section: Annealing Mirrorsmentioning

confidence: 99%

Integrated fiber-mirror ion trap for strong ion-cavity coupling

Brandstätter

McClung

Schüppert

et al. 2013

Review of Scientific Instruments

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“…With respect to the FM/oxide interface, XPS measurement has been proven to be an effective tool [19][20][21]. The XPS detectable sample depth is d = 3 sin˛, where is the inelastic mean-free paths (IMFPs) for photoelectrons and ˛ is the take off angle for photoelectrons with respect to the sample surface plane [22]. The IMFPs can be calculated by using the table compiled by Tanuma et al [23].…”

Section: Resultsmentioning

confidence: 99%

Effects of interfacial Fe electronic structures on magnetic and electronic transport properties in oxide/NiFe/oxide heterostructures

Liu

Chen

Zhang

et al. 2015

Applied Surface Science

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“…The vacuum of the analysis chamber was less than 3×10 −7 Pa. The XPS detectable sampling depth was d=3λsinα [14] , where λ and α are inelastic meanfree paths (IMFPs) for photoelectrons and a take-off angle for photoelectrons with respect to the samples surface plane, respectively. The IMFPs can be obtained by using the table compiled by Tanuma et al [15] The detectable depths from 2.3 to 0.6 nm are obtained when the take-off angle changes from 90° to 15°.…”

Section: Resultsmentioning

confidence: 99%

The influence of the nonmagnetic metal spacer Bi, Ag and Cu on the properties of the multilayer films

Zhu

et al. 2006

CHINESE SCI BULL

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Ta/NiFe/Bi(Ag, Cu)/FeMn/Ta and Ta/ NiFeⅠ /FeMn/Bi(Ag, Cu)/NiFeⅡ/Ta films were prepared by magnetic sputtering. The texture of films was examined by X-ray diffraction (XRD). The dependence of the H ex1 between NiFeⅠ/FeMn films and the H ex2 between FeMn/NiFeⅡ on the Bi, Ag and Cu thickness was studied in Ta/NiFeⅠ/FeMn/Bi(Ag, Cu)/ NiFeⅡ/Ta. The experimental results show that the H e1 ranged from 130 to 140 Oe with an increase in the nonmagnetic metal spacer thickness. The H ex2 decreased dramatically and became flat finally with the increase of the Bi, Ag and Cu thickness. XPS results show that Bi, Ag and Cu atoms do not stay entirely at the interface of FeMn/NiFeⅡ film; they are at least partly segregated to the surface of NiFe film. The more Bi, Ag and Cu atoms are deposited, the more they are segregated at the NiFe layer.

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AES and XPS study of thin RF-sputtered Ta2O5 layers

Cited by 189 publications

References 31 publications

Integrated fiber-mirror ion trap for strong ion-cavity coupling

Integrated fiber-mirror ion trap for strong ion-cavity coupling

Effects of interfacial Fe electronic structures on magnetic and electronic transport properties in oxide/NiFe/oxide heterostructures

The influence of the nonmagnetic metal spacer Bi, Ag and Cu on the properties of the multilayer films

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