Aerosol Jet Printing of SU-8 as a Passivation Layer Against Ionic Solutions

Ye, Shulin; Williams, Nicholas X.; Franklin, Aaron D.

doi:10.1007/s11664-021-09396-4

Cited by 5 publications

(8 citation statements)

References 41 publications

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“…A cross-sectional SEM image of this pristine SU-8 film is presented in Figure S2D, showing a ∼1 μm extension beyond the contact, which is a parameter that could play a role in the quality of SU-8's ability to passivate the electrodes. 51 The effects of soft-bake times are further confirmed by profilometry studies, which show that nonpassivated contacts (Figure S3A) and intact SU-8-passivated contacts made with a <30 s soft-bake (Figure S3B) consistently yield heights of ∼40 and ∼450 nm, respectively, whereas delaminated SU-8 (resulting from soft-bake times >60 s) yields unpredictable and nonuniform heights (Figure S3C). The average values collected over several measurements in Figure S3D for each contact also contrast the consistency in the height profile of intact SU-8 and the high variability of delaminated (>60 s soft-baked) SU-8.…”

Section: Resultsmentioning

confidence: 65%

“…Contrarily, imaging of Pd contacts with 0–30 s soft-baked SU-8 (Figures E and S2B) shows a pristine SU-8 film, as indicated by a uniform green hue on the contacts that is characteristic of SU-8. A cross-sectional SEM image of this pristine SU-8 film is presented in Figure S2D, showing a ∼1 μm extension beyond the contact, which is a parameter that could play a role in the quality of SU-8’s ability to passivate the electrodes . The effects of soft-bake times are further confirmed by profilometry studies, which show that nonpassivated contacts (Figure S3A) and intact SU-8-passivated contacts made with a <30 s soft-bake (Figure S3B) consistently yield heights of ∼40 and ∼450 nm, respectively, whereas delaminated SU-8 (resulting from soft-bake times >60 s) yields unpredictable and nonuniform heights (Figure S3C).…”

Section: Resultsmentioning

confidence: 99%

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Passivation Strategies for Enhancing Solution-Gated Carbon Nanotube Field-Effect Transistor Biosensing Performance and Stability in Ionic Solutions

Albarghouthi

Williams

Doherty

et al. 2022

ACS Appl. Nano Mater.

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Interest in point-of-care diagnostics has led to increasing demand for the development of nanomaterial-based electronic biosensors such as biosensor field-effect transistors (BioFETs) due to their inherent simplicity, sensitivity, and scalability. The utility of BioFETs, which use electrical transduction to detect biological signals, is directly dependent upon their electrical stability in detection-relevant environments. However, BioFET device structures vary substantially, especially in electrode passivation modalities. Improper passivation of electronic components in ionic solutions can lead to excessive leakage currents and signal drift, thus presenting a hinderance to signal detectability. Here, we harness the sensitivity of nanomaterials to study the effects of various passivation strategies on the performance and stability of a biosensing platform based on aerosol-jet-printed carbon nanotube thin-film transistors. Specifically, nonpassivated devices were compared to devices passivated with photoresist (SU-8), dielectric (HfO 2 ), or photoresist + dielectric (SU-8 followed by HfO 2 ) and were evaluated primarily by initial performance metrics, large-scale device yield, and stability throughout long-duration cycling in phosphate buffered saline. We find that all three passivation conditions result in improved device performance compared to nonpassivated devices, with the photoresist + dielectric strategy providing the lowest average leakage current in solution (∼2 nA). Notably, the photoresist + dielectric strategy also results in the greatest yield of BioFET devices meeting our selected performance criteria on a wafer scale (∼90%), the highest long-term stability in solution (<0.01% change in on-current), and the best average on/off-current ratio (∼10 4 ), hysteresis (∼32 mV), and subthreshold swing (∼192 mV/decade). This passivation schema has the potential to pave the path toward a truly high-yield, stable, and robust electrical biosensing platform.

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Section: Resultsmentioning

confidence: 65%

Section: Resultsmentioning

confidence: 99%

Passivation Strategies for Enhancing Solution-Gated Carbon Nanotube Field-Effect Transistor Biosensing Performance and Stability in Ionic Solutions

Albarghouthi

Williams

Doherty

et al. 2022

ACS Appl. Nano Mater.

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“…Some studies are present on some conductive, semiconductive, and dielectric polymeric inks. [ 33–46 ] Tarabella et al. and Hong et al studied the effect of the focusing ratio (FR), that is, the ratio between the ShGFR and the DrGFR, on the line width and thickness of PEDOT:PSS lines to fabricate conductive patterns.…”

Section: Introductionmentioning

confidence: 99%

“…Some studies are present on some conductive, semiconductive, and dielectric polymeric inks. [33][34][35][36][37][38][39][40][41][42][43][44][45][46] Tarabella et al and Hong et al studied the effect of the focusing ratio (FR), that is, the ratio between the ShGFR and the DrGFR, on the line width and thickness of PEDOT:PSS lines to fabricate conductive patterns. [33,34] Zips et al, instead, used AJP printing to fabricate micro-needles made of PEDOT:PSS loaded with carbon nanotubes for bioelectronic applications.…”

Section: Introductionmentioning

confidence: 99%

“…[41] Ye et al, instead, aerosol jet printed an epoxy-based polymer as a passivation layer for electronic biosensing devices and characterized the processing parameters of the ink. [42] However, no works have been reported on the AJP of benzocyclobutene (BCB), which is a thermoset polymer widely used in the electronic industry for applications such as wafer bonding, interlayer dielectric, and 3D integration. [47][48][49] Furthermore, the works reported in the literature do not cover some applications of dielectric polymers, such as wafer bonding.…”

Section: Introductionmentioning

confidence: 99%

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Aerosol Jet Printing of a Benzocyclobutene‐Based Ink as Adhesive Material for Wafer Bonding Application

Iervolino

Baldini

Gelmi

et al. 2022

Adv Materials Inter

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Aerosol jet printing (AJP) is an emerging additive manufacturing technology that is gaining increasing attention in the electronic field. Several studies have been carried out on the AJP of conductive, semiconductive, and dielectric polymers for electronic applications. However, wafer bonding is an application that is still uncovered by literature. Therefore, in this work, the AJP of benzocyclobutene (BCB) as a polymeric adhesive for wafer bonding is presented for the first time. A thorough characterization of the processing parameters is carried out to identify the most ideal conditions for printing at a relatively high speed. Then, square patterns are printed, proving the versatility of the AJP technology in terms of the reachable thickness of the deposited BCB patterns. Complex patterns with a resolution of ≈60 µm are also printed. The bonding properties of the BCB are characterized from a morphological and mechanical point of view. In particular, the shear strength of the BCB coatings deposited with AJP is ≈39 MPa and it is comparable with the shear strength of BCB coating deposited by spin‐coating. Consequently, AJP represents a valid alternative for the deposition of polymeric adhesive for wafer bonding.

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Experimental and simulation investigations on the morphology of aerosol jet printed polymer traces under in-situ UV and thermal curing conditions

Zhang

Cheng

et al. 2023

Additive Manufacturing

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Aerosol Jet Printing of SU-8 as a Passivation Layer Against Ionic Solutions

Cited by 5 publications

References 41 publications

Passivation Strategies for Enhancing Solution-Gated Carbon Nanotube Field-Effect Transistor Biosensing Performance and Stability in Ionic Solutions

Passivation Strategies for Enhancing Solution-Gated Carbon Nanotube Field-Effect Transistor Biosensing Performance and Stability in Ionic Solutions

Aerosol Jet Printing of a Benzocyclobutene‐Based Ink as Adhesive Material for Wafer Bonding Application

Experimental and simulation investigations on the morphology of aerosol jet printed polymer traces under in-situ UV and thermal curing conditions

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