Aerosol Jet Printing of Platinum Microheaters for the Application in Gas Sensors

Arsenov, Pavel V.; Vlasov, Ivan S.; Ефимов, А. А.; Min’kov, K. N.; Иванов, В. В.

doi:10.1088/1757-899x/473/1/012042

Cited by 16 publications

(13 citation statements)

References 5 publications

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“…Among the existing printing methods, aerosol jet printing is the most promising technology because it allows the formation of functional elements with a minimum lateral size of up to 10 microns [7][8][9] both on flat and curved substrates [10,11]. This technology has been applied for the manufacture of transistors [12], sensors [13][14][15], solar cells [16], microheaters [17], microantennas [18,19] and interconnects [20]. Previous studies of this technology relied mainly on the formation of thin-film microstructures due to the need for the manufacture of planar electronic devices.…”

Section: Introductionmentioning

confidence: 99%

Aerosol Jet Printing of Silver Lines with A High Aspect Ratio on A Heated Silicon Substrate

et al. 2020

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In this work, we studied the formation of conductive silver lines with high aspect ratios (AR = thickness/width) > 0.1 using the modernized method of aerosol jet printing on a heated silicon substrate. The geometric (AR) and electrical (resistivity) parameters of the formed lines were investigated depending on the number of printing layers (1–10 layers) and the temperature of the substrate (25–300 °C). The AR of the lines increased as the number of printing layers and the temperature of the substrate increased. An increase in the AR of the lines with increasing substrate temperature was associated with a decrease in the ink spreading as a result of an increase in the rate of evaporation of nano-ink. Moreover, with an increase in the substrate temperature of more than 200 °C, a significant increase in the porosity of the formed lines was observed, and as a result, the electrical resistivity of the lines increased significantly. Taking into account the revealed regularities, it was demonstrated that the formation of silver lines with a high AR > 0.1 and a low electrical resistivity of 2–3 μΩ∙cm is advisable to be carried out at a substrate temperature of about 100 °C. The adhesion strength of silver films formed on a heated silicon substrate is 2.8 ± 0.9 N/mm2, which further confirms the suitability of the investigated method of aerosol jet printing for electronic applications.

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Section: Introductionmentioning

confidence: 99%

Aerosol Jet Printing of Silver Lines with A High Aspect Ratio on A Heated Silicon Substrate

et al. 2020

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“…Figure 12 a shows a photo of curved Pt-microheater printed on a 20-μm-thick low-temperature co-fired ceramic (LTTC) membrane and sintered at 750 °C in a muffle furnace. The stencil of Pt-microheater was developed and presented in previous work [ 77 ]. This microheater had a curved shape and a heating line width of about 30 μm in the narrow part.…”

Section: Resultsmentioning

confidence: 99%

Synthesis of Nanoparticles by Spark Discharge as a Facile and Versatile Technique of Preparing Highly Conductive Pt Nano-Ink for Printed Electronics

et al. 2021

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A cost-effective, scalable and versatile method of preparing nano-ink without hazardous chemical precursors is a prerequisite for widespread adoption of printed electronics. Precursor-free synthesis by spark discharge is promising for this purpose. The synthesis of platinum nanoparticles (PtNPs) using a spark discharge under Ar, N2, and air has been investigated to prepare highly conductive nano-ink. The size, chemical composition, and mass production rate of PtNPs significantly depended on the carrier gas. Pure metallic PtNPs with sizes of 5.5 ± 1.8 and 7.1 ± 2.4 nm were formed under Ar and N2, respectively. PtNPs with sizes of 18.2 ± 9.0 nm produced using air consisted of amorphous oxide PtO and metallic Pt. The mass production rates of PtNPs were 53 ± 6, 366 ± 59, and 490 ± 36 mg/h using a spark discharge under Ar, N2, and air, respectively. It was found that the energy dissipated in the spark gap is not a significant parameter that determines the mass production rate. Stable Pt nano-ink (25 wt.%) was prepared only on the basis of PtNPs synthesized under air. Narrow (about 30 μm) and conductive Pt lines were formed by the aerosol jet printing with prepared nano-ink. The resistivity of the Pt lines sintered at 750 °C was (1.2 ± 0.1)·10−7 Ω·m, which is about 1.1 times higher than that of bulk Pt.

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“…Aerosol jet printing (AJP) is a leading‐edge direct write tool that can focus and deposit inks with fine features on a wide range of substrates. [ 1 ] As a high‐resolution additive manufacturing (AM) process, AJP has been adopted in a broad spectrum of electronics applications including interconnects, [ 2 ] stain gauges, [ 3 ] resonators, [ 4 ] robotic devices, [ 5 ] micro heaters, [ 6 ] and transmission lines. [ 7 ] AJP can print lines with widths ranging from 10 to 100 microns.…”

Section: Introductionmentioning

confidence: 99%

An Aerosol Jet Printed Resistance Temperature Detector‐Micro Hotplate with Temperature Coefficient of Resistance Stabilized by Electrical Sintering

Sui

Tsui

Thibodeaux

et al. 2023

Adv Materials Technologies

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Aerosol jet printing (AJP) is an emerging direct write tool enabling rapid prototyping and fabrication of electronics components. AJP provides faster and less expensive production of devices with feature sizes of >10 microns compared to traditional MEMS processes. Herein, the fabrication of a resistance temperature detector‐micro hotplate (RTD‐µHP) is reported using AJP printed silver. AJP eliminates sophisticated MEMS processes such as masking, alignment, and etching. The compatibility of the AJP process with a broad range of materials is demonstrated by printing highly resolved lines on rigid and flexible substrates. Optimal thermal sintering conditions of AJP printed silver (Ag) lines are found by in situ resistance measurements. To stabilize the temperature coefficient of resistance (TCR) of the RTD‐µHP at high operating current levels, electrical sintering is performed on the RTD‐µHPs. Electrical sintering improves the conductivity of fully thermally sintered Ag RTD‐µHPs by 32% and provides a burn‐in mechanism for stabilizing the TCR. The TCR of the RTD‐µHPs after electrical sintering is 3.80 × 10−3 at 22 °C, close to the value for bulk Ag. The performance of the RTD‐µHPs is tested using a reference thermocouple. The RTD‐µHPs show reliable and repeatable heating and temperature sensing up to 70 °C in air.

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Aerosol Jet Printing of Platinum Microheaters for the Application in Gas Sensors

Cited by 16 publications

References 5 publications

Aerosol Jet Printing of Silver Lines with A High Aspect Ratio on A Heated Silicon Substrate

Aerosol Jet Printing of Silver Lines with A High Aspect Ratio on A Heated Silicon Substrate

Synthesis of Nanoparticles by Spark Discharge as a Facile and Versatile Technique of Preparing Highly Conductive Pt Nano-Ink for Printed Electronics

An Aerosol Jet Printed Resistance Temperature Detector‐Micro Hotplate with Temperature Coefficient of Resistance Stabilized by Electrical Sintering

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