Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017 2017
DOI: 10.3390/proceedings1040316
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Aerosol Jet Printing of Miniaturized, Low Power Flexible Micro-Hotplates

Abstract: Abstract:We report on printed flexible micro-hotplates operating at high temperature at lower power consμmption than ever reported using aerosol jet printing of fine metallic conductor features. Efficient heating (i.e., 40 mW at 325 °C) was produced by reducing the effective heating area and substrates thickness. Gold (Au) nanoparticles solution was used for printing micro-hotplates of two different sizes, i.e., 500 × 500 μm 2 and 300 × 300 μm 2 , on 50 μm-and 13 μm-thick PI substrates, respectively. Comsol si… Show more

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Cited by 10 publications
(9 citation statements)
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“…In the main part of recent researches, e.g., [3,4], the authors used polyimide film as a substrate for the sensors made using InkJet and AerosolJet printing. This polymeric material permits the application of gas sensor at rather high working temperature-up to 350 °C-and enables the fabrication of flexible devices free of some disadvantages of silicon MEMS ones.…”
Section: Introductionmentioning
confidence: 99%
“…In the main part of recent researches, e.g., [3,4], the authors used polyimide film as a substrate for the sensors made using InkJet and AerosolJet printing. This polymeric material permits the application of gas sensor at rather high working temperature-up to 350 °C-and enables the fabrication of flexible devices free of some disadvantages of silicon MEMS ones.…”
Section: Introductionmentioning
confidence: 99%
“…Reproduced under the terms of the CC-BY license. [160] Copyright 2017, The Authors, published by MDPI.…”
Section: Integrated Microheatersmentioning
confidence: 99%
“…A similar study utilized AJP to produce miniaturized gold microplates on flexible polyimide substrates with an efficient power consumption of 54 mW at 325 °C (Figure 7b). [160] A parallel work included patterning gold-based microhotplates with ultralow power efficient heating (i.e., 12 °C mW −1 ) on double meander 150 × 150 μm 2 heaters. [156] Vasiliev et al and Samotaev et al have also been active in employing AJP toward the fabrication of platinum microheaters on ceramic membranes to advance MEMSbased sensors.…”
Section: Integrated Microheatersmentioning
confidence: 99%
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“…Wearable temperature sensors are also interesting for electronic skin applications and are widely explored in addition to many other sensing devices, aimed at the advancement of industrial and particularly social robots [ 121 , 122 ]. Printed thermal sensors are mostly based on the resistance measurements of a metallic structure against temperature rise, and the thermal coefficient of resistance (TCR) values are used to determine the temperature response accordingly [ 123 ]. Figure 13 shows representative examples of human-body-mounted temperature sensors providing data in real time.…”
Section: Wearable Sensorsmentioning
confidence: 99%