Aerosol-gel deposition and low temperature heat-treatment of SiO2 layers

Vautey, C.; Burgos, M.; Langlet, M.

doi:10.1016/s0040-6090(98)01755-6

Cited by 21 publications

(7 citation statements)

References 17 publications

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“…Figure a shows the three-dimensional in situ FTIR spectra collected during TEOS reacting with acetic acid in scCO 2 , which shows a gradual growth of the Si−O−Si bond (oxo bond) peak at ∼1066 cm −1 and water peak at 3343 cm −1 during the reaction times of 0−360 min. The TEOS monomer and SiO 2 product peaks are known to overlap with one another , and can be observed after curve fitting of the in situ FTIR spectra (see the Supporting Information, Figure SF1). In order to decrease the interference from other components, a region of the spectrum must be selected where the components of interest exhibit significant peaks.…”

Section: Resultsmentioning

confidence: 99%

Kinetics Study on the Sol−Gel Reactions in Supercritical CO₂ by Using In situ ATR-FTIR Spectrometry

Sui

Rizkalla

Charpentier

2008

Crystal Growth & Design

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Direct sol-gel processing in supercritical CO 2 (scCO 2 ) has been of significant interest for synthesizing oxide nanomaterials, and the reactions of metal alkoxides with organic acids have been extensively used for preparing metal complex crystals; however, a kinetics analysis of these reactions has not been reported. In this research, in situ ATR-FTIR spectra were collected during the sol-gel synthesis of Si, Ti, and Zr oxides in scCO 2 . Because of overlapping of the IR peaks, it was difficult to directly correlate the optical absorbance with the analyte concentrations. To solve this problem, we used a chemometrics method, simple-to-use interactive self-modeling mixture analysis (SIMPLISMA), to calculate the concentration profiles. The precursor conversions and the intermediate concentration profiles under different synthesis conditions were obtained. The different kinetics profiles of Ti and Zr complexes in the sol-gel reactions were related to the activity of the metal complexes, and the competition of the various condensation reactions.

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Section: Resultsmentioning

confidence: 99%

Kinetics Study on the Sol−Gel Reactions in Supercritical CO₂ by Using In situ ATR-FTIR Spectrometry

Sui

Rizkalla

Charpentier

2008

Crystal Growth & Design

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“…The absorption band has been widely studied for various silica materials, and, generally, is assigned to be the overlap of two pairs of transverse optical ͑TO͒ and longitudinal optical ͑LO͒ modes. [15][16][17] Figure 5 shows that the absorption band of the ascalcined nanoporous silica film without TMCS modification can be well resolved into four peaks by curve fitting, assuming a Gaussian shape for the absorption peaks. The low wavenumber peak at ϳ1069 cm Ϫ1 is assigned to be a transverse optical mode (TO 3 ), and is due to the stretching motion of oxygen atoms moving back and forth with respect to the adjacent silicon atoms and in phase with neighboring oxygen atoms.…”

Section: Resultsmentioning

confidence: 99%

Microstructure and Mechanical Properties of Surfactant Templated Nanoporous Silica Thin Films: Effect of Methylsilylation

Chen

Pan

Cho

et al. 2003

J. Electrochem. Soc.

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Microstructural and mechanical properties of organic surfactant templated nanoporous thin silica films have been studied by X-ray diffraction, Fourier transform infrared spectroscopy, and nanoindentation. Compared with many other porous low-k dielectrics, the self-assembled molecularly templated nanoporous silica films demonstrate better mechanical properties. This is ascribed to the presence of a well-ordered pore channel structure in the nanoporous silica thin films. Hardness and elastic modulus are strongly dependent on film preparation and modification methods. Trimethylsilylation by hexamethylsilazane vapor treatment effectively enhances the mechanical strength of the nanoporous silica films. When the sol precursor solution is mixed with trimethylchlorosilane ͑TMCS͒, the resulting nanoporous films have a weaker mechanical strength. The pore channel structure of the nanoporous silica film becomes less ordered for the TMCS derivatized nanoporous films. In addition, the chemical structure in the silica solid matrix of the TMCS derivatized films is more disordered than those without TMCS modification. The nanoindentation measurement results are discussed in terms of the pore microstructure of the nanoporous silica network and the springback effect due to the presence of trimethylsilyl groups in the nanopores.

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“…Complexing agents can also be used to reduce the functionality of alkoxides. For instance, a wide range of liquid solutions, compatible with a high ultrasonic pulverization efficiency, were adapted to the deposition of films in the SiO 2 -TiO 2 system (Langlet et al , 1995(Langlet et al , 2001a; Marage et al 1994a, b;Primeau et al 1997;Vautey et al 1999). This allowed a flexible implementation of the aerosol-gel process for the deposition of optical films with tailored refractive indices.…”

Section: Aerosol-gel Coating Technology Process Descriptionmentioning

confidence: 99%

Ultrasonic Pulverization of an Aerosol: A Versatile Tool for the Deposition of Sol–Gel Thin Films

Langlet¹

2017

Handbook of Sol-Gel Science and Technology

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Fine droplets with a narrow size distribution are generated from a liquid stream, when an ultrasonic or pneumatic spraying device is used. The liquid containing the sol-gel precursors breaks into droplets that are directed at a substrate, in some cases using a DC voltage for electrospraying. The process of spray deposition encompasses several techniques and many variables. By adjusting the variables, high quality optical films can be achieved. The advantages and disadvantages of these processes are discussed in detail.

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Aerosol-gel deposition and low temperature heat-treatment of SiO2 layers

Cited by 21 publications

References 17 publications

Kinetics Study on the Sol−Gel Reactions in Supercritical CO₂ by Using In situ ATR-FTIR Spectrometry

Kinetics Study on the Sol−Gel Reactions in Supercritical CO₂ by Using In situ ATR-FTIR Spectrometry

Microstructure and Mechanical Properties of Surfactant Templated Nanoporous Silica Thin Films: Effect of Methylsilylation

Ultrasonic Pulverization of an Aerosol: A Versatile Tool for the Deposition of Sol–Gel Thin Films

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Aerosol-gel deposition and low temperature heat-treatment of SiO2 layers

Cited by 21 publications

References 17 publications

Kinetics Study on the Sol−Gel Reactions in Supercritical CO2 by Using In situ ATR-FTIR Spectrometry

Kinetics Study on the Sol−Gel Reactions in Supercritical CO2 by Using In situ ATR-FTIR Spectrometry

Microstructure and Mechanical Properties of Surfactant Templated Nanoporous Silica Thin Films: Effect of Methylsilylation

Ultrasonic Pulverization of an Aerosol: A Versatile Tool for the Deposition of Sol–Gel Thin Films

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Kinetics Study on the Sol−Gel Reactions in Supercritical CO₂ by Using In situ ATR-FTIR Spectrometry

Kinetics Study on the Sol−Gel Reactions in Supercritical CO₂ by Using In situ ATR-FTIR Spectrometry