2021
DOI: 10.1063/5.0033844
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Advances of beveled mesas for GaN-based trench Schottky barrier diodes

Abstract: In this article, we propose and investigate a GaN-based trench metal–insulator–semiconductor barrier Schottky rectifier with a beveled mesa and field plate (BM-TMBS). According to our study, the beveled mesa and field plate structures help to reduce the density of potential lines at the mesa corner and deplete the drift region in two-dimensional mode, respectively. By doing so, the electric field at the bottom corner of the trenches and Schottky contact/GaN interface can be decreased significantly and the brea… Show more

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Cited by 5 publications
(3 citation statements)
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“…If we refer to Fig. 2(b), we find that the forward bias for VCSEL B3 becomes smaller than that for VCSEL B2, which is likely due to the increased hole concentration in the p-GaN layer and enhances the electrical conductivity therein for VCSEL B3 [24] . To prove our point, we then show the hole concentration profiles in the p-EBL/ the p-Al x Ga 1−x N heterojunction and p-GaN layer for VCSELs A, B1, B2, and B3 in Fig.…”
Section: Resultsmentioning
confidence: 89%
“…If we refer to Fig. 2(b), we find that the forward bias for VCSEL B3 becomes smaller than that for VCSEL B2, which is likely due to the increased hole concentration in the p-GaN layer and enhances the electrical conductivity therein for VCSEL B3 [24] . To prove our point, we then show the hole concentration profiles in the p-EBL/ the p-Al x Ga 1−x N heterojunction and p-GaN layer for VCSELs A, B1, B2, and B3 in Fig.…”
Section: Resultsmentioning
confidence: 89%
“…24,31) Furthermore, the impact ionization coefficients of electrons and holes in GaN material are represented by Chynowesh's equation, and are shown in Eqs. ( 1) and (2) 18,32) ( )…”
Section: Device Structure and Simulation Parametersmentioning
confidence: 99%
“…16) The BV is also influenced by the image force at the Schottky contact region, which leads to the energy band lowering effect and increases the leakage current. 17,18) The very strong electric field at the Schottky contact region will also trigger trap-assisted tunneling that will further increase the leakage current. 19,20) Then, a trench metal-insulator-semiconductor barrier-controlled Schottky (TMBS) rectifier is proposed to avoid premature breakdown by suppressing the image force and decreasing the trapassisted tunneling process.…”
Section: Introductionmentioning
confidence: 99%