Advances in Triboelectric Flow Sensor

Abstract

With the rapid development of advanced materials and manufacturing technologies, flow sensors have made significant progress in the field of mechanical engineering, which could cater to the development trend of the Internet of Things (IoT) and the ongoing Fourth Industrial Revolution. However, traditional power supply modes such as lithium batteries require regular recharging or replacement, which greatly causes too much inconvenience and maintenance consumption, and may also pose potential risks to the marine environment. The triboelectric nanogenerators (TENGs), based on the coupling effect of contact electrification and electrostatic induction, have been demonstrated to convert mechanical movements of the fluid into electrical signals with various features such as flexibility, conformability, and user‐friendliness. This review systematically summarizes for the first time the fundamental working mechanism, rational structural design, and analysis of practical application scenarios of triboelectric flow sensor as an emerging technology for flow monitoring of the Industrial IoT. According to the different fluid objects monitored, the latest representative achievements of triboelectric flow sensors can be divided into gas flow sensors, liquid flow sensors, and two‐phase flow sensors. Finally, the current challenges and future development directions of triboelectric flow sensors are examined, which can promote the further development of the field of the flow sensors.

MEMS sensitive structure sand and dust friction contamination test and electrical variation characteristics

“…In this context, ( 1) , n i j u  and ( ) , n i j u respectively represent the surface potential at a point with a step size of 1 n  and n 。 x  and y  represent the positional changes of the charge in the lateral and longitudinal directions during the two-dimensional dissipation process. By using the surface potential at a step size of n and the predetermined dissipation coefficient of D , the surface potential at a step size of 1 n  can be calculated：…”

“…In the field of Microelectromechanical Systems (MEMS) flow sensors [1], gas sensors [2], and optical MEMS, the sensitive structures or components of the devices need to be directly exposed to the working environment, making them susceptible to contamination from dust and other pollutants present in the environment. This contamination can lead to performance degradation of the devices, affecting their operational lifespan and stability.…”

Recent advances in solid–liquid triboelectric nanogenerator technologies, affecting factors, and applications

“…One of the main challenges in the development of current electrical devices is that traditional power supply modes are hampered by geographic location or battery life limitations, which greatly impede their ease of daily use. Therefore, the development of new self-powered devices is particularly critical 112 .…”