Our system is currently under heavy load due to increased usage. We're actively working on upgrades to improve performance. Thank you for your patience.
2023
DOI: 10.1039/d2ta10014b
|View full text |Cite
|
Sign up to set email alerts
|

Advances in sensing mechanisms and micro/nanostructured sensing layers for surface acoustic wave-based gas sensors

Abstract: Surface acoustic wave (SAW) technology has been extensively used in communications and highly sensitive sensing applications. For SAW based gas sensing applications, the sensitive material or sensing layer which is...

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4

Citation Types

0
6
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 24 publications
(6 citation statements)
references
References 221 publications
0
6
0
Order By: Relevance
“…15 Specifically, for SAW-based gas sensing applications, the sensitive material or sensing layer, which is coated onto SAW devices, is vital for its performance, as changes of sensing signals are strongly linked to perturbation of the sensing layer. 16 The layered structure is the core part of a SAW device, which typically consists of a piezoelectric substrate and an overlay layer (waveguide layer). Love-type waves are shear waves that can propagate through the waveguide layer, and the wave energy is concentrated on the surface of the layered structure.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…15 Specifically, for SAW-based gas sensing applications, the sensitive material or sensing layer, which is coated onto SAW devices, is vital for its performance, as changes of sensing signals are strongly linked to perturbation of the sensing layer. 16 The layered structure is the core part of a SAW device, which typically consists of a piezoelectric substrate and an overlay layer (waveguide layer). Love-type waves are shear waves that can propagate through the waveguide layer, and the wave energy is concentrated on the surface of the layered structure.…”
Section: Introductionmentioning
confidence: 99%
“…Surface acoustic wave (SAW) devices are widely used in several fields such as medicine, dielectric detection, biochemistry, and communication. The performance of SAW devices is directly influenced by the properties of the waveguide layer, such as piezoelectric films ZnO and AlN . Specifically, for SAW-based gas sensing applications, the sensitive material or sensing layer, which is coated onto SAW devices, is vital for its performance, as changes of sensing signals are strongly linked to perturbation of the sensing layer . The layered structure is the core part of a SAW device, which typically consists of a piezoelectric substrate and an overlay layer (waveguide layer).…”
Section: Introductionmentioning
confidence: 99%
“…A large fraction of gas-sensing techniques is based on resistive gas sensors [4][5][6][7][8], the infrared absorption method [9][10][11][12], optical sensors [13][14][15], acoustic sensors [16][17][18][19], etc. Resistive gas sensors are highly praised for their high sensitivity, which can effectively convert changes in the gas sensing environment into unique resistance signals, thus enabling accurate detection of various gases.…”
Section: Introductionmentioning
confidence: 99%
“…The target gas absorption in the sensitive film alters the surface acoustic wave speed and accordingly modulates the amplitude or phase of the sensor output signal. The sensitive material significantly influences the sensitivity, response speed, and selectivity of the SAW gas sensor, and is therefore often a key part of SAW gas sensors [ 10 , 11 ].…”
Section: Introductionmentioning
confidence: 99%