Advances in roll-to-roll imprint lithography for display applications

Jeans, Albert; Almanza-Workman, Marcia; Cobene, Robert; Elder, Richard; Garcia, Robert; Gomez-Pancorbo, Fernando; Jackson, Warren B.; Jam, Mehrban; Kim, Hanjun; Kwon, O–Kyun; Luo, Hao; Maltabes, John G.; Mei, Ping; Perlov, Craig; Smith, Mark D.; Taussig, Carl; Jeffrey, F. R.; Braymen, S.; Hauschildt, Jason; Junge, Kelly; Larson, Don; Stieler, Dan

doi:10.1117/12.852268

Cited by 25 publications

(11 citation statements)

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“…The tabletop R2R direct stamping apparatus is 100 cm long, 30 cm wide and 40 cm high when all the parts are assembled. An electric motor attached to the right upper roll rotates the upper stamp web at maximum speed of 1 m/min, which is comparable to those of other R2R apparatuses [6][7][8]. The web speed is important to achieve high throughput.…”

Section: Resultsmentioning

confidence: 99%

Roll-to-Roll Apparatus for Residue-Free Direct Stamping of Functional Nano-Inks

2013

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A tabletop prototype of a roll-to-roll (R2R) direct stamping apparatus has been developed.The prototype is about 100 cm long, 30 cm wide and 40 cm high and is operational up to the web speed of 1 m/min. While upper rolls carry a web with a patterned stamp on it clockwise, a sprayer on top of the R2R apparatus dispenses the nano-ink to fill in the stamp. Two other rolls with adhesive films completely remove the residual layer on the stamp. Final products remain on the substrate after de-stamping in which the web rolls up and the substrate moves to the further right. This roll-to-roll direct stamping apparatus demonstrates high throughput and material efficiency for fabrication of flexible micro-and nano-electronic devices.

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Section: Resultsmentioning

confidence: 99%

Roll-to-Roll Apparatus for Residue-Free Direct Stamping of Functional Nano-Inks

2013

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“…It can enable the patterning and alignment of submicron-sized features on meter-scaled flexible substrates in the R2R environment. The SAIL provides an effective way for mass producing flexible electronics and flexible display backplanes in particular for commercial production [33,34].…”

Section: R2r Uv-nilmentioning

confidence: 99%

Large-Area Nanoimprint Lithography and Applications

Lan¹

2018

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology

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Large-area nanoimprint lithography (NIL) has been regarded as one of the most promising micro/nano-manufacturing technologies for mass production of large-area micro/ nanoscale patterns and complex 3D structures and high aspect ratio features with low cost, high throughput, and high resolution. That opens the door and paves the way for many commercial applications not previously conceptualized or economically feasible. Great progresses in large-area nanoimprint lithography have been achieved in recent years. This chapter mainly presents a comprehensive review of recent advances in largearea NIL processes. Some promising solutions of large-area NIL and emerging methods, which can implement mass production of micro-and nanostructures over large areas on various substrates or surfaces, are described in detail. Moreover, numerous industriallevel applications and innovative products based on large-area NIL are also demonstrated. Finally, prospects, challenges, and future directions for industrial scale largearea NIL are addressed. An infrastructure of large-area nanoimprint lithography is proposed. In addition, some recent progresses and research activities in large-area NIL suitable for high volume manufacturing environments from our Labs are also introduced. This chapter may provide a reference and direction for the further explorations and studies of large-area micro/nanopatterning technologies.

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“…[22][23][24][25][26] Recently, we demonstrated large-area continuous roll-to-roll nanoimprinting of 1D and 2D micrometer to sub-100 nm features on fl exible substrate using perfl uoropolyether (PFPE) hybrid molds on a custom designed roll-toroll nanoimprinter. [ 27 ] R2RNIL is a platform process technology that can be adapted to a wide range of applications including fl at panel displays, [ 28,29 ] biomedical devices, [ 30 ] fl exible solar cells and antirefl ective coatings for solar cells. [ 31 ] But the full potential of R2R NIL fabrication has can be applied to other areas such as the fabrication of physical, chemical and biological sensors etc.…”

Section: Introductionmentioning

confidence: 99%

Suspended Multiwall Carbon Nanotube‐Based Infrared Sensors via Roll‐to‐Roll Fabrication

John

Muthee

Yogeesh

et al. 2014

Advanced Optical Materials

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thermoelectric [ 5,6 ] and photovoltaic [ 7 ] single wall carbon nanotubes (SWCNT) IR detectors shows good performance, but such detectors require asymmetric fabrication processes that are much more complex than what we describe in this paper. Fabrication of bolometric detectors is fairly straightforward and these can conveniently operate at room temperature. The functioning principle behind a bolometric CNT IR sensor involves incident radiation heating the CNT network, resulting in a measurable change in the CNT's electrical resistance since the resistance of CNTs strongly depends on the temperature. Therefore, reducing the CNT fi lm's thermal link to the environment is necessary to obtain an enhanced bolometric photoresponse. [ 1,8 ] For effi cient bolometer operation, the radiation absorber should have a large absorptivity, low heat capacity, and adequate temperature coeffi cient of resistance. [ 8 ] The very low density, high surface area and negligible heat capacity of CNTs make them very responsive as they are very sensitive to incident radiation. Accordingly, little absorption is needed to heat individual nanotubes and give a measurable response. The bolometric detectors require a bias voltage to generate a photoresponse whereas photovoltaic and thermopile detectors can operate under zero voltage. [ 6,9 ] CNT-based bolometric IR detectors can be broadly categorized into two groups: i) SWCNT-polymer composite fi lms where SWCNTs are uniformly embedded in polymer matrix [10][11][12][13][14] and ii) suspended SWCNT/MWCNT networks or individual bundles prepared by chemical vapor deposition (CVD) or vacuum fi ltration transfer. [ 1,8,[15][16][17][18] Recently, the bolometric characteristics of CNT-polystyrene composite fi lms were examined and a responsivity of 500 V/W and response time of around 200 ms for the composite IR sensor were observed. [ 12 ] Several similar reports on IR sensors based on CNT-polymer composite fi lms show response times on the order of hundreds of milliseconds. [10][11][12][13][14] Slower response time and complex sensor fabrication methods unsuitable for large volume fabrication are the major draw backs of CNT-polymer composite IR sensors and printed MWCNT IR sensors [ 19 ] on plastic. A plastic CNT sensor with the incorporation of an absorber and a refl ector for better sensor performance has also been reported. [ 20 ] Suspending CNTs in air or vacuum has been shown to reduce their thermal link to the environment leading to significant enhancement of the bolometric photoresponse. [ 1,8,[15][16][17][18]

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Advances in roll-to-roll imprint lithography for display applications

Cited by 25 publications

References 0 publications

Roll-to-Roll Apparatus for Residue-Free Direct Stamping of Functional Nano-Inks

Roll-to-Roll Apparatus for Residue-Free Direct Stamping of Functional Nano-Inks

Large-Area Nanoimprint Lithography and Applications

Suspended Multiwall Carbon Nanotube‐Based Infrared Sensors via Roll‐to‐Roll Fabrication

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