Advances in High-Voltage Modulators for Applications in Pulsed Power and Plasma-Based Ion Implantation

A previously proposed mechanism of adhesion of a plasma metal coating to a ceramic substrate is investigated experimentally. This adhesion mechanism is based on the increase in the concentration of structural defects (vacancies) and electron exchange interaction of a metal-oxide beryllium pair during the plasma thermal activation of the process. Given the brazing of ceramic products with hard solders in hydrogen, the coating composition for metallization is determined. The optimal temperature of reactive plasma metals coating for strong adhesion to the ceramic substrate is found. Methods to improve the technology of plasma vacuum metallization using ion-plasma magnetron sputtering and ion implantation are proposed.Index Terms-Diffusion of vacancies, high-power microwave devices, mechanism and kinetics of formation of adhesion, plasma metal coating, power layer.

Section: Introductionmentioning

confidence: 99%

Plasma Metallization Coating and Its Adhesion to Microwave Transistor Substrate—Part 1: Methods of Experimental Research

Vysikaylo

Mitin

et al. 2015

“…The quality of the coating adhesion to the ceramic substrate affects: 1) the mechanical strength of the assembly, which houses semiconductor structures with metal pins and 2) the heat transfer level, which ensures the required mode of operation of the transistor as a whole in the microwave range. Problems of heat dissipation in such systems are discussed in [1]- [4].…”

Section: Odernization Of Vacuum Metallization Technologymentioning

confidence: 99%

Plasma Metallization Coating and Its Adhesion to Microwave Transistor Substrate—Part 2: Experimental Study of 3-D Composite Coating

Vysikaylo

Mitin

et al. 2015

This paper reports an experimental study of the previously proposed mechanism of adhesion of a plasma metal coating to a ceramic substrate by an example of beryllium oxide. This adhesion mechanism is based on the increase in the concentration of structural defects (vacancies) and electron exchange interaction of a metal-oxide beryllium pair during the plasma thermal activation of the process. Given the brazing of ceramic products with hard solders in hydrogen, the coating composition for metallization is determined. The optimal temperature of reactive plasma metal coating for strong adhesion to the ceramic substrate is found. Methods to improve the technology of plasma vacuum metallization using ion-plasma magnetron sputtering and ion implantation are proposed. Recommendations for the deposition of 3-D composite coatings with maximum adhesion are given.Index Terms-Diffusion of vacancies, high-power microwave devices, mechanism and kinetics of the formation of adhesion, plasma metal coating, power layer.

“…Fully solid-state converters topologies, such as Marx-type bipolar generators [5], resonant step-up converters, or other hybrid/alternative solutions [6]- [10], could have an interest for this application. However, due to the above-mentioned global integration requirement, a low-voltage section for the mediumdistance power transmission and final voltage step-up stage are required.…”

Section: Power Converter Topology Selectionmentioning

confidence: 99%

Interconnected High-Voltage Pulsed-Power Converters System Design for H⁻ Ion Sources

Aguglia

2014

Abstract-This paper presents the design and experimental validations of a system of three new high-voltage (HV) pulsedpower converters for the H − sources. The system requires three pulsed voltages (50, 40, and 25 kV to ground) at 2-Hz repetition rate, for 700 µs of usable flat-top. The solution presents ripplefree output voltages and minimal stored energy to protect the ion source from the consequences of arc events. Experimental results on the final full-scale prototype are presented. In case of short-circuit events, the maximal energy delivered to the source is in the Joule range. HV flat-top stability of 1% is experimentally achieved with a simple Proportional-IntegralDerivative regulation and preliminary tuned H − source (e.g., radio frequency control, gas injection, and so forth). The system is running since more than a year with no power converter failures and damage to the source.