Frontiers in Guided Wave Optics and Optoelectronics 2010
DOI: 10.5772/39542
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Advances in Femtosecond Micromachining and Inscription of Micro and Nano Photonic Devices

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Cited by 8 publications
(2 citation statements)
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“…The invention and widespread use of femtosecond lasers allowed for the fabrication of micro-optical structures of higher resolution in various optical materials through several processes, like various forms of intensity-dependent nonlinear absorption. , According to these reviews, common challenges of those fabrication methods were the spatial forming of the femtosecond laser pulses, such as the elliptical cross section of the beam and the aberrations arising when tightly focusing the beam into a transparent dielectric. Due to the extremely high intensity at the focal spot, Kerr self-focusing also occurs.…”
Section: Introduction Previous Artmentioning
confidence: 99%
“…The invention and widespread use of femtosecond lasers allowed for the fabrication of micro-optical structures of higher resolution in various optical materials through several processes, like various forms of intensity-dependent nonlinear absorption. , According to these reviews, common challenges of those fabrication methods were the spatial forming of the femtosecond laser pulses, such as the elliptical cross section of the beam and the aberrations arising when tightly focusing the beam into a transparent dielectric. Due to the extremely high intensity at the focal spot, Kerr self-focusing also occurs.…”
Section: Introduction Previous Artmentioning
confidence: 99%
“…Femtosecond laser micromachining and inscription have attracted significant attention in the past decade, not only for material processing applications, such as cutting or drilling [1,2], but also for the fabrication of 3D photonic devices in transparent materials. When focusing a high-power femtosecond pulse inside a transparent dielectric material, the intensity at the focal region is high enough to initiate multiphoton ionization, which eventually leads to structural changes and permanent refractive index changes [3][4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%