Advancements and challenges in development of atomic force microscopy for nanofabrication

Tseng, Ampere A.

doi:10.1016/j.nantod.2011.08.003

Cited by 68 publications

(43 citation statements)

References 65 publications

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“…While these studies provide useful insights into friction and wear mechanisms at very low normal loads, they do not address the question of how to quantify contributions from plastic deformation to friction in single asperity contacts. Fundamental understanding of single asperity friction for nanoscale elastic-plastic contacts is also required for promising nanolithography techniques using AFM 11 . In addition, with the reduction of contact sizes to the nanometer length scale, adhesive forces between the tip and sample begin to play an increasingly important role 1 .…”

Section: Introductionmentioning

confidence: 99%

Friction model for single-asperity elastic-plastic contacts

et al. 2012

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In this article, we present a new analytical model that describes the plowing coefficient of friction for sliding, elastic-plastic contacts between a conical tip with a spherical extremity and a flat substrate. The model includes the effects of adhesion and bridges the gap between models which are based solely on dislocation activity and those based solely on interfacial effects scaling with the contact area. The DMT approximation for adhesive contact stress is used in our description of the contacts. Our model shows excellent agreement with large scale molecular dynamics simulations and AFM experiments of nanoscratching on copper single crystals. One important result of our study is that the model predicts coefficients of friction that are an order of magnitude higher than typically reported for nanoscale elastic contacts. Furthermore, the coefficients of friction described by the model are very close to values typical of macroscale sliding contacts.

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Section: Introductionmentioning

confidence: 99%

Friction model for single-asperity elastic-plastic contacts

et al. 2012

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“…They play a vital role for experimental investigation and manipulation of nanoscale biological [14], chemical [15], material [16], and physical processes [17]. During the past decade, various techniques have been applied for modeling and control of such stages to satisfy the critical requirements of different nanopositioning applications [18].…”

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confidence: 99%

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Zhu

et al. 2016

IEEE Trans. Automat. Sci. Eng.

491

216

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Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.Note to Practitioners-Piezo-actuated nanopositioning stages featuring fast response, large force, and fine resolution appear poised to play an increasingly important role in fields requiring micro/nano positioning. Such stages, however, exhibit complex piezoelectric behavior, which is often neglected, including: frequency response, nonlinear electric field dependence, creep, aging, and thermal behavior. The presence of such a behavior observed in the stages poses challenges in realizing precise micro/nanopositioning performance. This paper presents an overview of the piezo-actuated nanopositioning stages emphasizing the key role of modeling and control techniques, where high accuracy is important.

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“…The development of parallel SPL techniques using cantilever arrays and cantilever-free tip arrays is a critical issue in the future. Although improvements are still required in areas such as patterning effi ciency, uniformity and applicability to more systems, [ 64 ] we are confi dent that SPL will spur more advances in fundamental research and technological development for practical applications of polymer nanostructures in the future.…”

Section: Discussionmentioning

confidence: 99%

Polymer Nanostructures Made by Scanning Probe Lithography: Recent Progress in Material Applications

Xie

Zhou

Tao

et al. 2012

Macromol. Rapid Commun.

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Scanning probe lithography (SPL) is a series of techniques that utilizes a scanning probe or an array of probes for surface patterning. Recent developments of new material systems and patterning approaches have made SPL a promising, low‐cost, bench‐top, and versatile tool for fabricating various polymer nanostructures, with extraordinary importance in physical sciences, life sciences and nanotechnology. This feature article highlights the recent progress in four material applications: polymer resists, polymeric carriers for patterning functional materials, electronically active polymers and polymer brushes for tailoring surface morphology and functionality. An overview of future possibilities, with regard to challenges and opportunities in this field, is given at the end of the paper.

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Advancements and challenges in development of atomic force microscopy for nanofabrication

Cited by 68 publications

References 65 publications

Friction model for single-asperity elastic-plastic contacts

Friction model for single-asperity elastic-plastic contacts

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Polymer Nanostructures Made by Scanning Probe Lithography: Recent Progress in Material Applications

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