2006
DOI: 10.1117/12.681848
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Advanced mask rule check (MRC) tool

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“…However, they are inadequate to generate MRC-favorable optimized masks. MRC is used currently in the mask design process to constrain the mask geometries [21,22]. Usually, the minimum linear size of the SRAFs, and the distance from the SRAFs to the main body of the mask are forced to be above some prescribed thresholds.…”
Section: Introductionmentioning
confidence: 99%
“…However, they are inadequate to generate MRC-favorable optimized masks. MRC is used currently in the mask design process to constrain the mask geometries [21,22]. Usually, the minimum linear size of the SRAFs, and the distance from the SRAFs to the main body of the mask are forced to be above some prescribed thresholds.…”
Section: Introductionmentioning
confidence: 99%