Advanced in-production hotspot prediction and monitoring with micro-topography

Fanton, Pierre; Lakcher, Amine; Le-Gratiet, Bertrand; Simiz, J.-G.; Hasan, T.; Prentice, Christopher R.; Hunsche, S.; Sen, N.; Greca, R. La; Tien, H.; Depre, L.

doi:10.1109/asmc.2017.7969269

2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2017

DOI: 10.1109/asmc.2017.7969269

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Advanced in-production hotspot prediction and monitoring with micro-topography

Pierre Fanton

Amine Lakcher

Bertrand Le-Gratiet

et al.

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Advanced in-production hotspot prediction and monitoring with micro-topography

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References 7 publications

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