Advanced chemical deposition techniques - from research to production

Waser, Rainer; Schneller, Theo; Hoffmann‐Eifert, Susanne; Ehrhart, P.

doi:10.1080/10584580108015524

Cited by 63 publications

(29 citation statements)

References 24 publications

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“…If the substrate is polycrystalline, the orientation of the structures is random and this might influence the analysis of the data subsequently acquired. [75,76] We used the above method to fabricate epitaxial PZT structures with different shapes and sizes. We noticed that the misfit between the substrate and the grown structures influences the final shape.…”

Section: Self-assembled Nanoscale Structuresmentioning

confidence: 99%

Functional Perovskites – From Epitaxial Films to Nanostructured Arrays

Vrejoiu¹,

Alexe²,

Hesse³

et al. 2008

Adv Funct Materials

116

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Functional perovskite materials gain increasing significance due to their wide spectrum of attractive properties, including ferroelectric, ferromagnetic, conducting and multiferroic properties. Due to the developments of recent years, materials of this type can conveniently be grown, mainly by pulsed laser deposition, in the form of epitaxial films, multilayers, superlattices, and well‐ordered arrays of nanoislands. These structures allow for investigations of preparation–microstructure–property relations. A wide variation of the properties is possible, determined by strain, composition, defect contents, dimensional effects, and crystallographic orientation. An overview of our corresponding work of recent years is given, particularly focusing on epitaxial films, superlattices and nanoisland arrays of (anti)ferroelectric and multiferroic functional perovskites.

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Section: Self-assembled Nanoscale Structuresmentioning

confidence: 99%

Functional Perovskites – From Epitaxial Films to Nanostructured Arrays

Vrejoiu¹,

Alexe²,

Hesse³

et al. 2008

Adv Funct Materials

116

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“…Recently, there were a few attempts to fabricate ferroelectric nanostructures. However, the lead titanate nanograins obtained by a solution-based dilution technique on platinum-coated silicon had completely random orientation [3][4][5]. The analysis of the size effect can be rather complicated without any information on the crystal orientation of each grain since ferroelectric and piezoelectric properties are closely connected with crystallographic orientation [6].…”

Section: Introductionmentioning

confidence: 99%

Epitaxial Lead Zirconate Titanate Nanocrystals Obtained by a Self-Patterning Method

Szafraniak

Chu

Harnagea

et al. 2004

Integrated Ferroelectrics

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Epitaxial lead zirconate titanate nanoislands were obtained by a self-patterning method using the instability of ultrathin films during high-temperature treatments. After high-temperature annealing, the as-deposited film breaks into islands with a narrow size distribution. Nanostructures, as small as 20 nm lateral size with a height of 9 nm, were epitaxially grown on Nb-doped (001) SrTiO 3 substrates. The formation of nanostructures was investigated as a function of the initial film thickness and crystallisation condition. Single-crystal nanoislands were studied by scanning and high-resolution transmission electron microscopy, atomic force microscopy and X-ray diffraction. Ferroelectric switching of several individual islands was investigated by piezoresponse force microscopy.

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“…Some key investigations in this area are summarized in Refs. [5][6][7][8][9][10][11][12]and Refs. 112 and 113 also contain detailed information on the analysis of structural evolution processes.…”

Section: Precursor Structure Effectsmentioning

confidence: 99%