2021
DOI: 10.1080/10426914.2021.2001509
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Advanced abrasive-based nano-finishing processes: challenges, principles and recent applications

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Cited by 18 publications
(9 citation statements)
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References 160 publications
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“…Hardened steel Removing material from the surface of the material using sliding of abrasive particles of another material 0.184 µm Can deal with complex components [26,28,30] Elastic Emission Machining (EEM) silicon removing the material atom by atom with no cracks, deformation, or deep indentations Less than 0.0005 µm Removing material in loose abrasive-based machining [28,30,31] Chemical Mechanical Polishing (CMP) silicon…”
Section: Advanced Finishing Processmentioning
confidence: 99%
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“…Hardened steel Removing material from the surface of the material using sliding of abrasive particles of another material 0.184 µm Can deal with complex components [26,28,30] Elastic Emission Machining (EEM) silicon removing the material atom by atom with no cracks, deformation, or deep indentations Less than 0.0005 µm Removing material in loose abrasive-based machining [28,30,31] Chemical Mechanical Polishing (CMP) silicon…”
Section: Advanced Finishing Processmentioning
confidence: 99%
“…0.005 µm to 0.01 µm used in the finishing of the wafers made from silicon [28,30,32] Magnetic Abrasive Finishing (MAF) silicon nitride…”
Section: Advanced Finishing Processmentioning
confidence: 99%
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“…Several innovations are being integrated into MRFF techniques regularly to improve the surface finish and surface quality. 6 In these MRFF methods, MRPF is utilized. In this fluid, iron particles (IPs) and abrasive particles (APs) are present.…”
Section: Introductionmentioning
confidence: 99%