Junctions with the structure Ag TS /S(CH 2 ) n T// Ga 2 O 3 /EGaIn (where S(CH 2 ) n T is a self-assembled monolayer, SAM, of n-alkanethiolate bearing a terminal functional group T) make it possible to examine the response of rates of charge transport by tunneling to changes in the strength of the interaction between T and Ga 2 O 3 . Introducing a series of Lewis acidic/basic functional groups (T = −OH, −SH, −CO 2 H, −CONH 2 , and −PO 3 H) at the terminus of the SAM gave values for the tunneling current density, J(V) in A/cm 2 , that were indistinguishable (i.e., differed by less than a factor of 3) from the values observed with n-alkanethiolates of equivalent length. The insensitivity of the rate of tunneling to changes in the terminal functional group implies that replacing weak van der Waals contact interactions with stronger hydrogen-or ionic bonds at the T//Ga 2 O 3 interface does not change the shape (i.e., the height or width) of the tunneling barrier enough to affect rates of charge transport. A comparison of the injection current, J 0 , for T = −CO 2 H, and T = −CH 2 CH 3 −two groups having similar extended lengths (in Å, or in numbers of non-hydrogen atoms)−suggests that both groups make indistinguishable contributions to the height of the tunneling barrier.