2022
DOI: 10.3390/coatings12081220
|View full text |Cite
|
Sign up to set email alerts
|

Adhesion Strength of Amorphous Carbon Films Deposited on a Trench Sidewall

Abstract: Hydrogenated amorphous carbon (a-C:H) films were deposited on the sidewall of 3-mm-wide stainless steel or Si trench, and the adhesion strength of the films was evaluated using a micro-scratch tester. Particularly, the effects of carbon ion implantation and Si-containing interlayer (a-SiCx:H) as the pretreatments on the adhesion strength of the a-C:H films prepared on the trench sidewall were investigated. It was found that both carbon ion implantation and interlayer improved the adhesion strength of the a-C:H… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2024
2024
2024
2024

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
references
References 25 publications
0
0
0
Order By: Relevance