Abstract:In the production of semiconductors, ultrapure water is used for cleaning in each process. In recent years, the adverse effects of impurities in ultrapure water for cleaning have increased with the miniaturization and high integration of the circuit-line width of semiconductors. Therefore the demand for high-quality ultrapure water has increased. We examined the metal adhesion restraint on silicon wafers based on the adsorption of polystyrene sulfonate (PSA) and metal ions. PSA was microinjected into a sample … Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.