This paper shows that anodic oxidation of the metals Nb, Ta, and Al through thin solid electrolyte films of calcia stabilized zirconia (CSZ) is possible. The metal oxides grown are stoichiometric and the CSZ behaves like pure anodic oxide, since the electric field in CSZ in the 0.1–10 mA cm−2current density range is comparable with those in anodic oxides. Anodization of Nb|Ta|CSZ or Al|CSZ|Nb|Ta systems shows that only oxygen movements take place in CSZ during oxide growth (i.e., transport number of cations
t+=0
), while both oxygen and cations take part in ionic current in the metal oxides underlying and overlying the CSZ layer (i.e.,
t+≠0
). Thus the transport number of cations can be considered as an intrinsic property of an oxide layer, independent of the nature and of the position of the other layers. Possible microscopic transport mechanisms for oxygen and cations through superimposed oxide films are discussed.