Additive, subtractive and formative manufacturing of glass-based functional micro/nanostructures: A comprehensive review

Luo, Hong; Zhang, Yingying; Yu, Jianwu; Dong, Xinran; Zhou, Tianfeng

doi:10.1016/j.matdes.2023.112285

Cited by 8 publications

(2 citation statements)

References 352 publications

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“…Direct conformal printing technology provides a fast, reliable, and simple method for the realization of curved surface electronics and functional circuits with a 3D free-form surface [16][17][18][19]. However, because of technical limitations, it is currently only suitable for printing micro-or even millimeter scale structures.…”

Section: Introductionmentioning

confidence: 99%

Near-zero-adhesion-enabled intact wafer-scale resist-transfer printing for high-fidelity nanofabrication on arbitrary substrates

Shu,

Feng,

Liu

et al. 2023

Int. J. Extrem. Manuf.

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There is an urgent need for novel processes that can integrate different functional nanostructures onto specific substrates, so as to meet the fast-growing need for broad applications in nanoelectronics, nanophotonics, and flexible optoelectronics. Existing direct-lithography methods are difficult to use on flexible, nonplanar, and biocompatible surfaces. Therefore, this fabrication is usually accomplished by nanotransfer printing. However, large-scale integration of multiscale nanostructures with unconventional substrates remains challenging because fabrication yields and quality are often limited by the resolution, uniformity, adhesivity, and integrity of the nanostructures formed by direct transfer. Here, we proposed a resist-based transfer strategy enabled by near-zero adhesion, which was achieved by molecular modification to attain a critical surface energy interval. This approach enabled the intact transfer of wafer-scale, ultrathin-resist nanofilms onto arbitrary substrates with mitigated cracking and wrinkling, thereby facilitating the in situ fabrication of nanostructures for functional devices. Applying this approach, fabrication of three-dimensional-stacked multilayer structures with enhanced functionalities, nanoplasmonic structures with ∼10 nm resolution, and MoS2-based devices with excellent performance was demonstrated on specific substrates. These results collectively demonstrated the high stability, reliability, and throughput of our strategy for optical and electronic device applications.

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Section: Introductionmentioning

confidence: 99%

Near-zero-adhesion-enabled intact wafer-scale resist-transfer printing for high-fidelity nanofabrication on arbitrary substrates

Shu,

Feng,

Liu

et al. 2023

Int. J. Extrem. Manuf.

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“…Most nanoscale printing methods are in the range of tens to hundreds of nanometers, exploring new principles capable of producing features at several nanometers or atomic level to construct systems is extremely attractive. For example, precise control of atomic arrangement in 3D via atomic layer deposition [47] or focused electron/ion-based methods [48], and flexible integration of high-resolution additive manufacturing (AM), selective etching and self-assembly techniques [49,50]. The even greater challenge is to expand the printable material categories.…”

mentioning

confidence: 99%

Multi-material 3D nanoprinting for structures to functional micro/nanosystems

Duan,

Xie,

Yin

et al. 2024

Int. J. Extrem. Manuf.

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Multi-material 3D fabrication at the nanoscale has been a long-sought goal in additive manufacturing, with great potential for the direct construction of functional micro/nanosystems rather than just arbitrary 3D structures. To achieve this goal, researchers have introduced several nanoscale 3D printing principles, explored various multi-material switching and combination strategies, and demonstrated their potential applications in 3D integrated circuits, optoelectronics, biological devices, micro/nanorobots, etc. Although some progress has been made, it is still at the primary stage and a serious breakthrough is needed to directly construct functional micro/nano systems. In this perspective, the development, current status and prospects of multi-material 3D nanoprinting are presented. We envision that this 3D printing will unlock innovative solutions and make significant contributions to various technologies and industries in the near future.

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