Additive fabrication of integrated ferroelectric thin‐film capacitors using self‐assembled organic thin‐film templates

Abstract

Copolymer grafting: Grafting of the copolymer onto a glass substrate was effected according to Scheme 1. A freshly cleansed glass slide was immersed (under dry nitrogen atmosphere in a glove box) into a 5 % vlv solution of SiC14 in dry hexane for 20 min and then washed with dry hexane and chloroform, prior to immersion into a solution of RCPTh in dry chloroform (1 mgl mL). After 12 h, the glass slide was rinsed successively with chloroform and THE Subsequently, the glass slide was sonicated in dry hexane at about 40°C for 20 min and then in anhydrous chloroform at about 40°C for 30 min.FTIR reflectance spectra were recorded on a Bio-Red TFS instrument, using a reflecting accessory. UV-visible absorption spectra were measured on a Shimiduza 1600 spectrophotometer. X-ray photoelectron spectroscopy (XPS) analysis was performed on a VG ESCA or SIMLAB MKII spectrometer equipped with a Mg K, radiation source (1253.7eV). All core-level spectra were corrected for surface charging by reference to the designated C(1s) binding energy at 285.0 eV. Spectra deconvolutions were carried ont using the Gaussian component, with the same full widths at half-maximum (FWHM) for each component in a particular spectrum. Surface atom ratios were obtained from peak area ratios, corrected with the appropriate experimentally determined sensitivity factors. Atomic force microscopy (AFM) measurements were made using a Digital Instrument Nanoscope I11 AFM.

Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks

“…CP is a particularly promising method that has the potential for patterning large areas quickly. It was first described by Whitesides and Kumar (7) and has since been explored by us and others for constructing simple devices in the areas of lasers (11), fiber optics (12), inorganic microelectronics (13)(14)(15), microfluidic analytical chemistry (16), and biotechnology (17). We recently reported processing conditions that enable CP to be used for fabricating the source͞drain level in a variety of basic organic electronic devices (8,(18)(19)(20).…”

Topographical Evolution of Lead Zirconate Titanate (PZT) Thin Films Patterned by Micromolding in Capillaries

“…Later work by the same research group demonstrated the use of the technique for patterning tantalum(V) oxide (Ta 2 O 5 ) on silicon, aluminized silicon, and platinized silicon wafers 11 and PZT on platinum. 12 They achieved line widths as small as 4 µm with 100 nm resolution and vertical thickness of 80 to 120 nm with their resulting patterned thin film oxides. 11 Their work is well summarized in a review article.…”

“…The use of the soft lithography techniques pioneered by Whitesides and co-workers 9 has resulted in the development of new fabrication methods for micropatterned ceramic thin films. 8,[10][11][12][13][14][15][16][17][18][19][20] The techniques used for patterning inorganic thin films fall into three categories. The first uses the elastomeric mold as a stamp to effect the microcontact printing (µCP) of selfassembled monolayers (SAM) of surfactants, most commonly octadecyltrichlorosilane (OTS).…”

Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors

“…The results described above encouraged us to examine the utility of this form of soft lithography as a potentially efficient method for the fabricating important forms of microelectronics devices. [20][21][22]42,43 To do so, we carried out a process sequence yielding silicon-based thin-film transistors using SOI source wafers as a model system. The details of the procedures used to fabricate these transistors are given in the Experiment section.…”

“…Representative soft-lithographic techniques that have found varying degrees of attention in research and for possible applications in technology include microcontact printing ͑ CP͒, [5][6][7] replica molding ͑REM͒, 8,9 microtransfer molding ͑ TM͒, [10][11][12][13] micromolding in capillaries ͑MIMIC͒, [14][15][16] and solvent assisted micromolding ͑SAMIM͒. 17 These techniques are useful for fabricating a variety of functional components and devices for use in areas such as optics, 18,19 microelectronics, [20][21][22] microanalysis, [23][24][25][26] and microelectromechanical system ͑MEMS͒. 27 The work reported to date establishes the broad utility of PDMS as a foundation material for soft-lithographic patterning-its properties being exploited with benefit for myriad forms of contact-lithographic patterning and, more recently, as a component material for constructing the complex forms of MEMS and microfluidic devices.…”